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- W1488943119 abstract "The analysis and optimisation of a microphotonic structure for high speed and efficient optical detection of metal-semiconductor-metal (MSM-PD) type based on polysilicon thin layer as light absorption region is presented. The photoresponse of the MSM-PD is analyzed in dependence with material parameters and structure geometry for simultaneously optimization of the speed and responsivity. The results of the analysis have been applied for design and fabrication of a MSM-PD structure on polycrystalline silicon layer deposited by LPCVD on Si substrate covered with a SiO/sub 2/ layer. The thickness of this insulating layer was design to assure a high reflectance of unabsorbed light at the first path through the thin polysilicon layer. Advantages of a high bandwidth in the GHz range and a fabrication process compatible with conventional CMOS make this type of photodetector one of the most attractively for photonic integrated circuits." @default.
- W1488943119 created "2016-06-24" @default.
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- W1488943119 date "2005-06-01" @default.
- W1488943119 modified "2023-09-23" @default.
- W1488943119 title "Analysis and optimization of an MSM photodetector based on thin polysilicon layer" @default.
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- W1488943119 doi "https://doi.org/10.1109/icm.2004.1434218" @default.
- W1488943119 hasPublicationYear "2005" @default.
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