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• W1489131885 abstract "In this paper we report the chemical-solution processing of dense insulating ferroelectric thin layers with emphasis on the patterning of device structures. A review is presented for a wide range of patterning techniques and details are reported for new additive methods that appear suited for ferroelectric applications." @default.
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• W1489131885 date "2002-11-11" @default.
• W1489131885 modified "2023-09-27" @default.
• W1489131885 title "Chemical-solution processing and patterning of integrated ferroelectrics" @default.
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• W1489131885 doi "https://doi.org/10.1109/isaf.2000.941502" @default.
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