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- W1489136489 abstract "The controlling concentration and location of nitrogen in SiON film by using TM plasma, and the improvement in the NBTI lifetime due to shallow nitrogen profile of fabricated specimen were reported." @default.
- W1489136489 created "2016-06-24" @default.
- W1489136489 creator A5006848190 @default.
- W1489136489 creator A5006853770 @default.
- W1489136489 creator A5008740145 @default.
- W1489136489 creator A5010341869 @default.
- W1489136489 creator A5050005428 @default.
- W1489136489 creator A5064455444 @default.
- W1489136489 creator A5084880356 @default.
- W1489136489 creator A5090201638 @default.
- W1489136489 date "2003-01-01" @default.
- W1489136489 modified "2023-09-23" @default.
- W1489136489 title "Drastically improved NBTI lifetime by periodic plasma nitridation for 90 nm mobile applications at low voltage operation" @default.
- W1489136489 cites W2053764683 @default.
- W1489136489 doi "https://doi.org/10.1109/iwgi.2003.159202" @default.
- W1489136489 hasPublicationYear "2003" @default.
- W1489136489 type Work @default.
- W1489136489 sameAs 1489136489 @default.
- W1489136489 citedByCount "1" @default.
- W1489136489 crossrefType "proceedings-article" @default.
- W1489136489 hasAuthorship W1489136489A5006848190 @default.
- W1489136489 hasAuthorship W1489136489A5006853770 @default.
- W1489136489 hasAuthorship W1489136489A5008740145 @default.
- W1489136489 hasAuthorship W1489136489A5010341869 @default.
- W1489136489 hasAuthorship W1489136489A5050005428 @default.
- W1489136489 hasAuthorship W1489136489A5064455444 @default.
- W1489136489 hasAuthorship W1489136489A5084880356 @default.
- W1489136489 hasAuthorship W1489136489A5090201638 @default.
- W1489136489 hasConcept C119599485 @default.
- W1489136489 hasConcept C121332964 @default.
- W1489136489 hasConcept C127413603 @default.
- W1489136489 hasConcept C165801399 @default.
- W1489136489 hasConcept C172385210 @default.
- W1489136489 hasConcept C178790620 @default.
- W1489136489 hasConcept C185592680 @default.
- W1489136489 hasConcept C192562407 @default.
- W1489136489 hasConcept C195370968 @default.
- W1489136489 hasConcept C49040817 @default.
- W1489136489 hasConcept C537208039 @default.
- W1489136489 hasConcept C557185 @default.
- W1489136489 hasConcept C61696701 @default.
- W1489136489 hasConcept C62520636 @default.
- W1489136489 hasConcept C82706917 @default.
- W1489136489 hasConceptScore W1489136489C119599485 @default.
- W1489136489 hasConceptScore W1489136489C121332964 @default.
- W1489136489 hasConceptScore W1489136489C127413603 @default.
- W1489136489 hasConceptScore W1489136489C165801399 @default.
- W1489136489 hasConceptScore W1489136489C172385210 @default.
- W1489136489 hasConceptScore W1489136489C178790620 @default.
- W1489136489 hasConceptScore W1489136489C185592680 @default.
- W1489136489 hasConceptScore W1489136489C192562407 @default.
- W1489136489 hasConceptScore W1489136489C195370968 @default.
- W1489136489 hasConceptScore W1489136489C49040817 @default.
- W1489136489 hasConceptScore W1489136489C537208039 @default.
- W1489136489 hasConceptScore W1489136489C557185 @default.
- W1489136489 hasConceptScore W1489136489C61696701 @default.
- W1489136489 hasConceptScore W1489136489C62520636 @default.
- W1489136489 hasConceptScore W1489136489C82706917 @default.
- W1489136489 hasLocation W14891364891 @default.
- W1489136489 hasOpenAccess W1489136489 @default.
- W1489136489 hasPrimaryLocation W14891364891 @default.
- W1489136489 hasRelatedWork W1966897839 @default.
- W1489136489 hasRelatedWork W2033255168 @default.
- W1489136489 hasRelatedWork W2046191958 @default.
- W1489136489 hasRelatedWork W2097090133 @default.
- W1489136489 hasRelatedWork W2132890255 @default.
- W1489136489 hasRelatedWork W2595359438 @default.
- W1489136489 hasRelatedWork W2626055167 @default.
- W1489136489 hasRelatedWork W2904005736 @default.
- W1489136489 hasRelatedWork W2943878757 @default.
- W1489136489 hasRelatedWork W4225298529 @default.
- W1489136489 isParatext "false" @default.
- W1489136489 isRetracted "false" @default.
- W1489136489 magId "1489136489" @default.
- W1489136489 workType "article" @default.