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- W1489215084 abstract "Al2O3 thin films synthesized by plasma-enhanced atomic layer deposition(ALD) at room temperature (25 oC) have been tested as water vapor per-meation barriers for OLED devices. Silicon nitride films (a-SiNx:H)deposited by plasma-enhanced chemical vapor deposition (PE-CVD) servedas reference and were used to develop Al2O3/a-SiNx:H stacks. On the basisof Ca test measurements, a very low intrinsic water vapor transmissionrate (WVTR) of ≤ 2·10-6 g·m-2·day-1 and 4·10-6 g·m-2·day-1 (20 oC/50% relative humidity) were found for 20-40 nm Al2O3 and 300 nm a-SiNx:Hfilms respectively. The cathode particle coverage was a factor four betterfor the Al2O3 films compared to the a-SiNx:H films and an average of 0.12defects per cm2 was obtained for a stack consisting of three barrier layers(Al2O3/ a-SiNx:H/ Al2O3)." @default.
- W1489215084 created "2016-06-24" @default.
- W1489215084 creator A5018346857 @default.
- W1489215084 creator A5037380722 @default.
- W1489215084 creator A5062605773 @default.
- W1489215084 creator A5065752180 @default.
- W1489215084 creator A5082522882 @default.
- W1489215084 date "2011-11-21" @default.
- W1489215084 modified "2023-09-23" @default.
- W1489215084 title "Cathode encapsulation of OLEDs by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks" @default.
- W1489215084 hasPublicationYear "2011" @default.
- W1489215084 type Work @default.
- W1489215084 sameAs 1489215084 @default.
- W1489215084 citedByCount "0" @default.
- W1489215084 crossrefType "journal-article" @default.
- W1489215084 hasAuthorship W1489215084A5018346857 @default.
- W1489215084 hasAuthorship W1489215084A5037380722 @default.
- W1489215084 hasAuthorship W1489215084A5062605773 @default.
- W1489215084 hasAuthorship W1489215084A5065752180 @default.
- W1489215084 hasAuthorship W1489215084A5082522882 @default.
- W1489215084 hasConcept C113196181 @default.
- W1489215084 hasConcept C121332964 @default.
- W1489215084 hasConcept C147789679 @default.
- W1489215084 hasConcept C158960510 @default.
- W1489215084 hasConcept C171250308 @default.
- W1489215084 hasConcept C185592680 @default.
- W1489215084 hasConcept C19067145 @default.
- W1489215084 hasConcept C192562407 @default.
- W1489215084 hasConcept C194760766 @default.
- W1489215084 hasConcept C2777431650 @default.
- W1489215084 hasConcept C2779227376 @default.
- W1489215084 hasConcept C38347018 @default.
- W1489215084 hasConcept C43617362 @default.
- W1489215084 hasConcept C49040817 @default.
- W1489215084 hasConcept C49110097 @default.
- W1489215084 hasConcept C544956773 @default.
- W1489215084 hasConcept C57410435 @default.
- W1489215084 hasConcept C69544855 @default.
- W1489215084 hasConcept C97355855 @default.
- W1489215084 hasConceptScore W1489215084C113196181 @default.
- W1489215084 hasConceptScore W1489215084C121332964 @default.
- W1489215084 hasConceptScore W1489215084C147789679 @default.
- W1489215084 hasConceptScore W1489215084C158960510 @default.
- W1489215084 hasConceptScore W1489215084C171250308 @default.
- W1489215084 hasConceptScore W1489215084C185592680 @default.
- W1489215084 hasConceptScore W1489215084C19067145 @default.
- W1489215084 hasConceptScore W1489215084C192562407 @default.
- W1489215084 hasConceptScore W1489215084C194760766 @default.
- W1489215084 hasConceptScore W1489215084C2777431650 @default.
- W1489215084 hasConceptScore W1489215084C2779227376 @default.
- W1489215084 hasConceptScore W1489215084C38347018 @default.
- W1489215084 hasConceptScore W1489215084C43617362 @default.
- W1489215084 hasConceptScore W1489215084C49040817 @default.
- W1489215084 hasConceptScore W1489215084C49110097 @default.
- W1489215084 hasConceptScore W1489215084C544956773 @default.
- W1489215084 hasConceptScore W1489215084C57410435 @default.
- W1489215084 hasConceptScore W1489215084C69544855 @default.
- W1489215084 hasConceptScore W1489215084C97355855 @default.
- W1489215084 hasLocation W14892150841 @default.
- W1489215084 hasOpenAccess W1489215084 @default.
- W1489215084 hasPrimaryLocation W14892150841 @default.
- W1489215084 hasRelatedWork W1966387993 @default.
- W1489215084 hasRelatedWork W1967049418 @default.
- W1489215084 hasRelatedWork W2011318056 @default.
- W1489215084 hasRelatedWork W2012509946 @default.
- W1489215084 hasRelatedWork W2023806821 @default.
- W1489215084 hasRelatedWork W2035970788 @default.
- W1489215084 hasRelatedWork W2037927197 @default.
- W1489215084 hasRelatedWork W2048867109 @default.
- W1489215084 hasRelatedWork W2056475565 @default.
- W1489215084 hasRelatedWork W2084345240 @default.
- W1489215084 hasRelatedWork W2125334071 @default.
- W1489215084 hasRelatedWork W2175051149 @default.
- W1489215084 hasRelatedWork W2330297988 @default.
- W1489215084 hasRelatedWork W2343828790 @default.
- W1489215084 hasRelatedWork W2417111576 @default.
- W1489215084 hasRelatedWork W2461078267 @default.
- W1489215084 hasRelatedWork W2542457975 @default.
- W1489215084 hasRelatedWork W2786326398 @default.
- W1489215084 hasRelatedWork W2952259775 @default.
- W1489215084 hasRelatedWork W3037478641 @default.
- W1489215084 isParatext "false" @default.
- W1489215084 isRetracted "false" @default.
- W1489215084 magId "1489215084" @default.
- W1489215084 workType "article" @default.