Matches in SemOpenAlex for { <https://semopenalex.org/work/W1489267167> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1489267167 abstract "This paper describes the use of photo-polymerization of precursor as a versatile and cost-effective means of fabricating SiCN ceramic MEMS. SiCN is a new class of polymer-derived ceramics whose starting material is a liquid-phase polymer. By adding a photo-initiator to the precursor, photolithographical patterning of the precursor can lie accomplished by UV exposure. The resulting solid polymer structures are then crosslinked under isostatic pressure, and pyrolyzed. Thermal decomposition transforms the polymer to an amorphous ceramic capable of withstanding over 1500/spl deg/C. By adding and curing successive layers of liquid polymer precursor on top of one another, multi-layered ceramic structures can be easily fabricated. The use of photo-polymerization can also be used to make thin, membrane-like ceramic structures. By combining photo-polymerization with other in-house developed techniques such as polymer-based bonding and flip-chip bonding, three SiCN MEMS devices for high temperature applications have been fabricated: an electrostatic actuator, a pressure transducer, and a combustion chamber. These represent a wide range of MEMS, demonstrating the versatility of this technique." @default.
- W1489267167 created "2016-06-24" @default.
- W1489267167 creator A5000013421 @default.
- W1489267167 creator A5000739831 @default.
- W1489267167 creator A5029506293 @default.
- W1489267167 creator A5053190469 @default.
- W1489267167 creator A5057626532 @default.
- W1489267167 creator A5062187564 @default.
- W1489267167 creator A5074061385 @default.
- W1489267167 creator A5078935034 @default.
- W1489267167 creator A5090700301 @default.
- W1489267167 date "2002-11-13" @default.
- W1489267167 modified "2023-09-23" @default.
- W1489267167 title "Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor" @default.
- W1489267167 cites W1840127618 @default.
- W1489267167 cites W1970901447 @default.
- W1489267167 cites W2047131570 @default.
- W1489267167 cites W2114831450 @default.
- W1489267167 cites W2126042543 @default.
- W1489267167 cites W2053072321 @default.
- W1489267167 doi "https://doi.org/10.1109/memsys.2001.906485" @default.
- W1489267167 hasPublicationYear "2002" @default.
- W1489267167 type Work @default.
- W1489267167 sameAs 1489267167 @default.
- W1489267167 citedByCount "2" @default.
- W1489267167 crossrefType "proceedings-article" @default.
- W1489267167 hasAuthorship W1489267167A5000013421 @default.
- W1489267167 hasAuthorship W1489267167A5000739831 @default.
- W1489267167 hasAuthorship W1489267167A5029506293 @default.
- W1489267167 hasAuthorship W1489267167A5053190469 @default.
- W1489267167 hasAuthorship W1489267167A5057626532 @default.
- W1489267167 hasAuthorship W1489267167A5062187564 @default.
- W1489267167 hasAuthorship W1489267167A5074061385 @default.
- W1489267167 hasAuthorship W1489267167A5078935034 @default.
- W1489267167 hasAuthorship W1489267167A5090700301 @default.
- W1489267167 hasConcept C127413603 @default.
- W1489267167 hasConcept C132976073 @default.
- W1489267167 hasConcept C134132462 @default.
- W1489267167 hasConcept C136525101 @default.
- W1489267167 hasConcept C142724271 @default.
- W1489267167 hasConcept C159985019 @default.
- W1489267167 hasConcept C171250308 @default.
- W1489267167 hasConcept C178790620 @default.
- W1489267167 hasConcept C185592680 @default.
- W1489267167 hasConcept C192562407 @default.
- W1489267167 hasConcept C204787440 @default.
- W1489267167 hasConcept C36759035 @default.
- W1489267167 hasConcept C37977207 @default.
- W1489267167 hasConcept C42360764 @default.
- W1489267167 hasConcept C44228677 @default.
- W1489267167 hasConcept C521977710 @default.
- W1489267167 hasConcept C56052488 @default.
- W1489267167 hasConcept C71924100 @default.
- W1489267167 hasConceptScore W1489267167C127413603 @default.
- W1489267167 hasConceptScore W1489267167C132976073 @default.
- W1489267167 hasConceptScore W1489267167C134132462 @default.
- W1489267167 hasConceptScore W1489267167C136525101 @default.
- W1489267167 hasConceptScore W1489267167C142724271 @default.
- W1489267167 hasConceptScore W1489267167C159985019 @default.
- W1489267167 hasConceptScore W1489267167C171250308 @default.
- W1489267167 hasConceptScore W1489267167C178790620 @default.
- W1489267167 hasConceptScore W1489267167C185592680 @default.
- W1489267167 hasConceptScore W1489267167C192562407 @default.
- W1489267167 hasConceptScore W1489267167C204787440 @default.
- W1489267167 hasConceptScore W1489267167C36759035 @default.
- W1489267167 hasConceptScore W1489267167C37977207 @default.
- W1489267167 hasConceptScore W1489267167C42360764 @default.
- W1489267167 hasConceptScore W1489267167C44228677 @default.
- W1489267167 hasConceptScore W1489267167C521977710 @default.
- W1489267167 hasConceptScore W1489267167C56052488 @default.
- W1489267167 hasConceptScore W1489267167C71924100 @default.
- W1489267167 hasLocation W14892671671 @default.
- W1489267167 hasOpenAccess W1489267167 @default.
- W1489267167 hasPrimaryLocation W14892671671 @default.
- W1489267167 hasRelatedWork W135355943 @default.
- W1489267167 hasRelatedWork W1484716706 @default.
- W1489267167 hasRelatedWork W1538023961 @default.
- W1489267167 hasRelatedWork W1556158583 @default.
- W1489267167 hasRelatedWork W1572624370 @default.
- W1489267167 hasRelatedWork W1874804985 @default.
- W1489267167 hasRelatedWork W1999071672 @default.
- W1489267167 hasRelatedWork W2054655763 @default.
- W1489267167 hasRelatedWork W2059983101 @default.
- W1489267167 hasRelatedWork W2086877788 @default.
- W1489267167 hasRelatedWork W2106871557 @default.
- W1489267167 hasRelatedWork W2139571516 @default.
- W1489267167 hasRelatedWork W2156008501 @default.
- W1489267167 hasRelatedWork W2316333429 @default.
- W1489267167 hasRelatedWork W2336225827 @default.
- W1489267167 hasRelatedWork W2519732964 @default.
- W1489267167 hasRelatedWork W2527936835 @default.
- W1489267167 hasRelatedWork W2539070534 @default.
- W1489267167 hasRelatedWork W2542446233 @default.
- W1489267167 hasRelatedWork W3143384023 @default.
- W1489267167 isParatext "false" @default.
- W1489267167 isRetracted "false" @default.
- W1489267167 magId "1489267167" @default.
- W1489267167 workType "article" @default.