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- W1489742492 abstract "This paper presents the packaging and residual stress effects on three-axis silicon-on-insulator (SOI) micro-electro-mechanical system (MEMS) accelerometer by using finite element method (FEM). The 3D FEM model was established and the resonance frequency was obtained by modal analysis method. This paper also developed a simple compensation model for trimming the offset of capacitance differentiation by measuring resonance frequency. It can be trimmed by adjusting application-specific integrated circuit (ASIC) gain. The capacitance differentiation offset which is caused by packaging effect can be effectively compensated to the standard capacitance differentiation." @default.
- W1489742492 created "2016-06-24" @default.
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- W1489742492 date "2015-04-01" @default.
- W1489742492 modified "2023-09-24" @default.
- W1489742492 title "Research on packaging effects of three-axis SOI MEMS accelerometer" @default.
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- W1489742492 doi "https://doi.org/10.1109/eurosime.2015.7103101" @default.
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