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- W1489783456 abstract "In this paper we present design, fabrication, and characterization results for the smallest published fully-packaged accelerometers. The miniaturization is realized by utilizing an advanced packaging scheme using a thick film epitaxial grown polysilicon encapsulation technique. Using this approach, released, encapsulated MEMS devices can be fabricated with exterior dimensions only 10s of microns larger than the micromechanical element. This advantage enables us to make accelerometers almost 2 orders of magnitude smaller than others. We have fabricated accelerometers as small as 0.034mm/sup 3/ (387/spl times/387/spl times/230/spl mu/m) with noise floor of 0.25mg/sqrt(Hz)." @default.
- W1489783456 created "2016-06-24" @default.
- W1489783456 creator A5031124366 @default.
- W1489783456 creator A5035300426 @default.
- W1489783456 creator A5047835599 @default.
- W1489783456 creator A5052271234 @default.
- W1489783456 creator A5052759258 @default.
- W1489783456 creator A5057536109 @default.
- W1489783456 creator A5087560422 @default.
- W1489783456 date "2005-07-06" @default.
- W1489783456 modified "2023-09-23" @default.
- W1489783456 title "Fully encapsulated sub-millimeter accelerometers" @default.
- W1489783456 cites W1588525015 @default.
- W1489783456 cites W2156296049 @default.
- W1489783456 cites W2160855436 @default.
- W1489783456 cites W2171450230 @default.
- W1489783456 doi "https://doi.org/10.1109/memsys.2005.1453938" @default.
- W1489783456 hasPublicationYear "2005" @default.
- W1489783456 type Work @default.
- W1489783456 sameAs 1489783456 @default.
- W1489783456 citedByCount "7" @default.
- W1489783456 countsByYear W14897834562017 @default.
- W1489783456 countsByYear W14897834562018 @default.
- W1489783456 crossrefType "proceedings-article" @default.
- W1489783456 hasAuthorship W1489783456A5031124366 @default.
- W1489783456 hasAuthorship W1489783456A5035300426 @default.
- W1489783456 hasAuthorship W1489783456A5047835599 @default.
- W1489783456 hasAuthorship W1489783456A5052271234 @default.
- W1489783456 hasAuthorship W1489783456A5052759258 @default.
- W1489783456 hasAuthorship W1489783456A5057536109 @default.
- W1489783456 hasAuthorship W1489783456A5087560422 @default.
- W1489783456 hasConcept C109792285 @default.
- W1489783456 hasConcept C111919701 @default.
- W1489783456 hasConcept C119599485 @default.
- W1489783456 hasConcept C120665830 @default.
- W1489783456 hasConcept C121332964 @default.
- W1489783456 hasConcept C127413603 @default.
- W1489783456 hasConcept C136525101 @default.
- W1489783456 hasConcept C142724271 @default.
- W1489783456 hasConcept C145667562 @default.
- W1489783456 hasConcept C171250308 @default.
- W1489783456 hasConcept C192562407 @default.
- W1489783456 hasConcept C204787440 @default.
- W1489783456 hasConcept C24326235 @default.
- W1489783456 hasConcept C37977207 @default.
- W1489783456 hasConcept C41008148 @default.
- W1489783456 hasConcept C49040817 @default.
- W1489783456 hasConcept C57528182 @default.
- W1489783456 hasConcept C71924100 @default.
- W1489783456 hasConcept C89805583 @default.
- W1489783456 hasConceptScore W1489783456C109792285 @default.
- W1489783456 hasConceptScore W1489783456C111919701 @default.
- W1489783456 hasConceptScore W1489783456C119599485 @default.
- W1489783456 hasConceptScore W1489783456C120665830 @default.
- W1489783456 hasConceptScore W1489783456C121332964 @default.
- W1489783456 hasConceptScore W1489783456C127413603 @default.
- W1489783456 hasConceptScore W1489783456C136525101 @default.
- W1489783456 hasConceptScore W1489783456C142724271 @default.
- W1489783456 hasConceptScore W1489783456C145667562 @default.
- W1489783456 hasConceptScore W1489783456C171250308 @default.
- W1489783456 hasConceptScore W1489783456C192562407 @default.
- W1489783456 hasConceptScore W1489783456C204787440 @default.
- W1489783456 hasConceptScore W1489783456C24326235 @default.
- W1489783456 hasConceptScore W1489783456C37977207 @default.
- W1489783456 hasConceptScore W1489783456C41008148 @default.
- W1489783456 hasConceptScore W1489783456C49040817 @default.
- W1489783456 hasConceptScore W1489783456C57528182 @default.
- W1489783456 hasConceptScore W1489783456C71924100 @default.
- W1489783456 hasConceptScore W1489783456C89805583 @default.
- W1489783456 hasLocation W14897834561 @default.
- W1489783456 hasOpenAccess W1489783456 @default.
- W1489783456 hasPrimaryLocation W14897834561 @default.
- W1489783456 hasRelatedWork W1489673410 @default.
- W1489783456 hasRelatedWork W1588525015 @default.
- W1489783456 hasRelatedWork W1991073300 @default.
- W1489783456 hasRelatedWork W1997028149 @default.
- W1489783456 hasRelatedWork W2024381120 @default.
- W1489783456 hasRelatedWork W2094984659 @default.
- W1489783456 hasRelatedWork W2116252297 @default.
- W1489783456 hasRelatedWork W2125443191 @default.
- W1489783456 hasRelatedWork W2131190589 @default.
- W1489783456 hasRelatedWork W2139229801 @default.
- W1489783456 hasRelatedWork W2143099681 @default.
- W1489783456 hasRelatedWork W2147705630 @default.
- W1489783456 hasRelatedWork W2783281450 @default.
- W1489783456 hasRelatedWork W2794804106 @default.
- W1489783456 hasRelatedWork W2908312775 @default.
- W1489783456 hasRelatedWork W3124378868 @default.
- W1489783456 hasRelatedWork W3177253785 @default.
- W1489783456 hasRelatedWork W3210211269 @default.
- W1489783456 hasRelatedWork W1548674502 @default.
- W1489783456 hasRelatedWork W2233462042 @default.
- W1489783456 isParatext "false" @default.
- W1489783456 isRetracted "false" @default.
- W1489783456 magId "1489783456" @default.
- W1489783456 workType "article" @default.