Matches in SemOpenAlex for { <https://semopenalex.org/work/W1489855781> ?p ?o ?g. }
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- W1489855781 endingPage "5" @default.
- W1489855781 startingPage "1" @default.
- W1489855781 abstract "This paper reports on the development of low temperature (<;190°C) plasma-enhanced chemical vapour deposition (PECVD) processes used to deposit silicon oxide/silicon nitride film stacks for use as passivation layers over exposed through-silicon vias in thinned (<;60μm), 300mm silicon wafers, temporarily bonded to silicon or glass carriers. The deposition processes are optimized to provide excellent electrical isolation with the films having low leakage currents and high breakdown voltages. The deposited stacks are also used to compensate for wafer bow resulting from CMOS front-side wafer processes and so provide a method of preventing excessive bow when the thinned silicon wafer is de-bonded from its carrier. Crucially, electrical properties and stack stress are shown to be stable with no drift over time when exposed to atmosphere." @default.
- W1489855781 created "2016-06-24" @default.
- W1489855781 creator A5034575158 @default.
- W1489855781 creator A5035644041 @default.
- W1489855781 creator A5058219305 @default.
- W1489855781 creator A5063318882 @default.
- W1489855781 creator A5067666837 @default.
- W1489855781 date "2014-01-06" @default.
- W1489855781 modified "2023-09-23" @default.
- W1489855781 title "Low temperature dielectric deposition for via-reveal passivation" @default.
- W1489855781 hasPublicationYear "2014" @default.
- W1489855781 type Work @default.
- W1489855781 sameAs 1489855781 @default.
- W1489855781 citedByCount "0" @default.
- W1489855781 crossrefType "journal-article" @default.
- W1489855781 hasAuthorship W1489855781A5034575158 @default.
- W1489855781 hasAuthorship W1489855781A5035644041 @default.
- W1489855781 hasAuthorship W1489855781A5058219305 @default.
- W1489855781 hasAuthorship W1489855781A5063318882 @default.
- W1489855781 hasAuthorship W1489855781A5067666837 @default.
- W1489855781 hasConcept C127413603 @default.
- W1489855781 hasConcept C133386390 @default.
- W1489855781 hasConcept C139719470 @default.
- W1489855781 hasConcept C151730666 @default.
- W1489855781 hasConcept C159985019 @default.
- W1489855781 hasConcept C160671074 @default.
- W1489855781 hasConcept C162324750 @default.
- W1489855781 hasConcept C192562407 @default.
- W1489855781 hasConcept C24326235 @default.
- W1489855781 hasConcept C2777042071 @default.
- W1489855781 hasConcept C2777431650 @default.
- W1489855781 hasConcept C2779227376 @default.
- W1489855781 hasConcept C2816523 @default.
- W1489855781 hasConcept C33574316 @default.
- W1489855781 hasConcept C38347018 @default.
- W1489855781 hasConcept C49040817 @default.
- W1489855781 hasConcept C544956773 @default.
- W1489855781 hasConcept C57410435 @default.
- W1489855781 hasConcept C64297162 @default.
- W1489855781 hasConcept C86803240 @default.
- W1489855781 hasConceptScore W1489855781C127413603 @default.
- W1489855781 hasConceptScore W1489855781C133386390 @default.
- W1489855781 hasConceptScore W1489855781C139719470 @default.
- W1489855781 hasConceptScore W1489855781C151730666 @default.
- W1489855781 hasConceptScore W1489855781C159985019 @default.
- W1489855781 hasConceptScore W1489855781C160671074 @default.
- W1489855781 hasConceptScore W1489855781C162324750 @default.
- W1489855781 hasConceptScore W1489855781C192562407 @default.
- W1489855781 hasConceptScore W1489855781C24326235 @default.
- W1489855781 hasConceptScore W1489855781C2777042071 @default.
- W1489855781 hasConceptScore W1489855781C2777431650 @default.
- W1489855781 hasConceptScore W1489855781C2779227376 @default.
- W1489855781 hasConceptScore W1489855781C2816523 @default.
- W1489855781 hasConceptScore W1489855781C33574316 @default.
- W1489855781 hasConceptScore W1489855781C38347018 @default.
- W1489855781 hasConceptScore W1489855781C49040817 @default.
- W1489855781 hasConceptScore W1489855781C544956773 @default.
- W1489855781 hasConceptScore W1489855781C57410435 @default.
- W1489855781 hasConceptScore W1489855781C64297162 @default.
- W1489855781 hasConceptScore W1489855781C86803240 @default.
- W1489855781 hasLocation W14898557811 @default.
- W1489855781 hasOpenAccess W1489855781 @default.
- W1489855781 hasPrimaryLocation W14898557811 @default.
- W1489855781 hasRelatedWork W1512815792 @default.
- W1489855781 hasRelatedWork W1604567059 @default.
- W1489855781 hasRelatedWork W1673604064 @default.
- W1489855781 hasRelatedWork W1970838820 @default.
- W1489855781 hasRelatedWork W1994400694 @default.
- W1489855781 hasRelatedWork W2043419509 @default.
- W1489855781 hasRelatedWork W2081539712 @default.
- W1489855781 hasRelatedWork W2106469776 @default.
- W1489855781 hasRelatedWork W2133499067 @default.
- W1489855781 hasRelatedWork W2133769754 @default.
- W1489855781 hasRelatedWork W2140300583 @default.
- W1489855781 hasRelatedWork W2149400831 @default.
- W1489855781 hasRelatedWork W2162658356 @default.
- W1489855781 hasRelatedWork W2560818680 @default.
- W1489855781 hasRelatedWork W2970603479 @default.
- W1489855781 hasRelatedWork W3136355776 @default.
- W1489855781 hasRelatedWork W1607693556 @default.
- W1489855781 hasRelatedWork W2415824004 @default.
- W1489855781 hasRelatedWork W2840301405 @default.
- W1489855781 hasRelatedWork W2851156065 @default.
- W1489855781 isParatext "false" @default.
- W1489855781 isRetracted "false" @default.
- W1489855781 magId "1489855781" @default.
- W1489855781 workType "article" @default.