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- W1490249969 abstract "For removal treatments of used sulfur hexafluoride (SF/sub 6/) gas, a combination process in non-thermal plasma decomposition with photochemical collection toward a suitable material is experimentally investigated. In the present process, oxyfluorides such as SOF/sub 2/, SO/sub 2/F/sub 2/, and SOF/sub 4/ produced by non-thermal plasma are decomposed by photochemical reactions; consequently the decomposed molecules are adsorbed to a solid calcium compound material. Since the reaction requires relative higher-energy photons to activate the molecules, a vacuum-ultraviolet light irradiation emitted from a Xe discharge lamp is effective to the reaction. The vacuum-ultraviolet photochemical reaction to non-thermal plasma oxidized SF/sub 6/ gases is evaluated in an experimentally constructed reactor and the SF/sub 6/ removal treatment based on the photochemical reaction is discussed." @default.
- W1490249969 created "2016-06-24" @default.
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- W1490249969 date "2005-12-22" @default.
- W1490249969 modified "2023-09-27" @default.
- W1490249969 title "An experimental study on vacuum-ultraviolet photochemical reaction to non-thermal plasma oxidized SF/sub 6/ gases" @default.
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- W1490249969 doi "https://doi.org/10.1109/ceidp.2005.1560776" @default.
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