Matches in SemOpenAlex for { <https://semopenalex.org/work/W1490265544> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1490265544 abstract "This paper presents the use of silane and dichlorosilane based tungsten silicide in deep submicron interconnection process. The modified annealing silicidation treatment, described in this paper, can extend even silane-based tungsten silicide suitable for 0.35 /spl mu/m level contact technology. More than 3 orders of contact resistance is reduced. Dichlorosilane based tungsten silicide outperforms silane based tungsten silicide because of its better step coverage from TEM direct evidence. The modified annealing silicidation treatment using large nitrogen flow can also lower about 20% of contact resistance for dichlorosilane based tungsten silicide. Our study also indicates the contact resistance dependence on underlayers where tungsten silicide grown on amorphous silicon can achieve lower contact resistance compared with that on grainy polysilicon underlayer. This work provide a promising manufacturable solution to deep submicron high aspect ratio contact technology." @default.
- W1490265544 created "2016-06-24" @default.
- W1490265544 creator A5029117959 @default.
- W1490265544 creator A5038382563 @default.
- W1490265544 creator A5065622589 @default.
- W1490265544 creator A5070840299 @default.
- W1490265544 creator A5076419742 @default.
- W1490265544 creator A5082008387 @default.
- W1490265544 date "2002-11-19" @default.
- W1490265544 modified "2023-09-26" @default.
- W1490265544 title "Thermal treatment and underlayer effects on silane and dichlorosilane based tungsten silicide for deep sub-micron interconnection processes" @default.
- W1490265544 cites W1588147763 @default.
- W1490265544 cites W1595461508 @default.
- W1490265544 cites W1976337745 @default.
- W1490265544 cites W2006425485 @default.
- W1490265544 cites W2031168800 @default.
- W1490265544 cites W2079588200 @default.
- W1490265544 doi "https://doi.org/10.1109/vtsa.1995.524658" @default.
- W1490265544 hasPublicationYear "2002" @default.
- W1490265544 type Work @default.
- W1490265544 sameAs 1490265544 @default.
- W1490265544 citedByCount "0" @default.
- W1490265544 crossrefType "proceedings-article" @default.
- W1490265544 hasAuthorship W1490265544A5029117959 @default.
- W1490265544 hasAuthorship W1490265544A5038382563 @default.
- W1490265544 hasAuthorship W1490265544A5065622589 @default.
- W1490265544 hasAuthorship W1490265544A5070840299 @default.
- W1490265544 hasAuthorship W1490265544A5076419742 @default.
- W1490265544 hasAuthorship W1490265544A5082008387 @default.
- W1490265544 hasConcept C123671423 @default.
- W1490265544 hasConcept C159985019 @default.
- W1490265544 hasConcept C171250308 @default.
- W1490265544 hasConcept C185592680 @default.
- W1490265544 hasConcept C191897082 @default.
- W1490265544 hasConcept C192562407 @default.
- W1490265544 hasConcept C2777855556 @default.
- W1490265544 hasConcept C2778024649 @default.
- W1490265544 hasConcept C2779227376 @default.
- W1490265544 hasConcept C2779523567 @default.
- W1490265544 hasConcept C2780901251 @default.
- W1490265544 hasConcept C49040817 @default.
- W1490265544 hasConcept C542268612 @default.
- W1490265544 hasConcept C544956773 @default.
- W1490265544 hasConcept C56052488 @default.
- W1490265544 hasConcept C8010536 @default.
- W1490265544 hasConceptScore W1490265544C123671423 @default.
- W1490265544 hasConceptScore W1490265544C159985019 @default.
- W1490265544 hasConceptScore W1490265544C171250308 @default.
- W1490265544 hasConceptScore W1490265544C185592680 @default.
- W1490265544 hasConceptScore W1490265544C191897082 @default.
- W1490265544 hasConceptScore W1490265544C192562407 @default.
- W1490265544 hasConceptScore W1490265544C2777855556 @default.
- W1490265544 hasConceptScore W1490265544C2778024649 @default.
- W1490265544 hasConceptScore W1490265544C2779227376 @default.
- W1490265544 hasConceptScore W1490265544C2779523567 @default.
- W1490265544 hasConceptScore W1490265544C2780901251 @default.
- W1490265544 hasConceptScore W1490265544C49040817 @default.
- W1490265544 hasConceptScore W1490265544C542268612 @default.
- W1490265544 hasConceptScore W1490265544C544956773 @default.
- W1490265544 hasConceptScore W1490265544C56052488 @default.
- W1490265544 hasConceptScore W1490265544C8010536 @default.
- W1490265544 hasLocation W14902655441 @default.
- W1490265544 hasOpenAccess W1490265544 @default.
- W1490265544 hasPrimaryLocation W14902655441 @default.
- W1490265544 hasRelatedWork W1519320217 @default.
- W1490265544 hasRelatedWork W1529559656 @default.
- W1490265544 hasRelatedWork W1831785206 @default.
- W1490265544 hasRelatedWork W1980345176 @default.
- W1490265544 hasRelatedWork W1985684458 @default.
- W1490265544 hasRelatedWork W1996135053 @default.
- W1490265544 hasRelatedWork W2017214160 @default.
- W1490265544 hasRelatedWork W2031493432 @default.
- W1490265544 hasRelatedWork W2039137828 @default.
- W1490265544 hasRelatedWork W2105983831 @default.
- W1490265544 hasRelatedWork W2148781836 @default.
- W1490265544 hasRelatedWork W2543553490 @default.
- W1490265544 hasRelatedWork W2547050338 @default.
- W1490265544 hasRelatedWork W124882543 @default.
- W1490265544 hasRelatedWork W2125681891 @default.
- W1490265544 hasRelatedWork W2242715580 @default.
- W1490265544 hasRelatedWork W2248477868 @default.
- W1490265544 hasRelatedWork W2279225582 @default.
- W1490265544 hasRelatedWork W2840417066 @default.
- W1490265544 hasRelatedWork W2863681486 @default.
- W1490265544 isParatext "false" @default.
- W1490265544 isRetracted "false" @default.
- W1490265544 magId "1490265544" @default.
- W1490265544 workType "article" @default.