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- W1490481927 abstract "The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems." @default.
- W1490481927 created "2016-06-24" @default.
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- W1490481927 date "2009-09-01" @default.
- W1490481927 modified "2023-10-18" @default.
- W1490481927 title "Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS" @default.
- W1490481927 hasPublicationYear "2009" @default.
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