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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1492292496> ?p ?o ?g. }

• W1492292496 endingPage "2209" @default.
• W1492292496 startingPage "2207" @default.
• W1492292496 abstract "We report a flat band voltage instability of a p+ polycrystalline-Si (poly-Si)/Al2O3/n-Si metal–oxide–semiconductor (MOS) system due to boron penetration. The flat band voltage shift of the p+ poly-Si/Al2O3/n-Si MOS capacitor determined by capacitance–voltage measurement was ∼1.54 V, corresponding to a p-type dopant level of 8.8×1012 B ions/cm2 as the activation temperature increased from 800 to 850 °C. Noticeable boron diffusion into the n-type Si channel was also observed by secondary ion mass spectroscopy with activation annealing above 850 °C. Incorporation of an ultrathin (∼5 Å) silicon oxynitride interlayer between Al2O3 and Si was effective in blocking B penetration, reducing the flat band shift to ∼90 mV." @default.
• W1492292496 created "2016-06-24" @default.
• W1492292496 creator A5004148039 @default.
• W1492292496 creator A5046397783 @default.
• W1492292496 creator A5049364750 @default.
• W1492292496 creator A5070512930 @default.
• W1492292496 creator A5082434986 @default.
• W1492292496 date "2000-10-02" @default.
• W1492292496 modified "2023-10-14" @default.
• W1492292496 title "Boron penetration in p+ polycrystalline-Si/Al2O3/Si metal–oxide–semiconductor system" @default.
• W1492292496 cites W1602271190 @default.
• W1492292496 cites W1970200102 @default.
• W1492292496 cites W1992343392 @default.
• W1492292496 cites W1999160597 @default.
• W1492292496 cites W2024166218 @default.
• W1492292496 cites W2024484920 @default.
• W1492292496 cites W2041993015 @default.
• W1492292496 cites W2101781928 @default.
• W1492292496 doi "https://doi.org/10.1063/1.1315346" @default.
• W1492292496 hasPublicationYear "2000" @default.
• W1492292496 type Work @default.
• W1492292496 sameAs 1492292496 @default.
• W1492292496 citedByCount "42" @default.
• W1492292496 countsByYear W14922924962012 @default.
• W1492292496 countsByYear W14922924962013 @default.
• W1492292496 countsByYear W14922924962016 @default.
• W1492292496 countsByYear W14922924962019 @default.
• W1492292496 countsByYear W14922924962020 @default.
• W1492292496 countsByYear W14922924962021 @default.
• W1492292496 countsByYear W14922924962022 @default.
• W1492292496 crossrefType "journal-article" @default.
• W1492292496 hasAuthorship W1492292496A5004148039 @default.
• W1492292496 hasAuthorship W1492292496A5046397783 @default.
• W1492292496 hasAuthorship W1492292496A5049364750 @default.
• W1492292496 hasAuthorship W1492292496A5070512930 @default.
• W1492292496 hasAuthorship W1492292496A5082434986 @default.
• W1492292496 hasConcept C108225325 @default.
• W1492292496 hasConcept C113196181 @default.
• W1492292496 hasConcept C147789679 @default.
• W1492292496 hasConcept C159985019 @default.
• W1492292496 hasConcept C171250308 @default.
• W1492292496 hasConcept C17525397 @default.
• W1492292496 hasConcept C178790620 @default.
• W1492292496 hasConcept C185592680 @default.
• W1492292496 hasConcept C191897082 @default.
• W1492292496 hasConcept C191952053 @default.
• W1492292496 hasConcept C192562407 @default.
• W1492292496 hasConcept C2777855556 @default.
• W1492292496 hasConcept C2779227376 @default.
• W1492292496 hasConcept C2779851234 @default.
• W1492292496 hasConcept C2780565262 @default.
• W1492292496 hasConcept C30066665 @default.
• W1492292496 hasConcept C43617362 @default.
• W1492292496 hasConcept C49040817 @default.
• W1492292496 hasConcept C501308230 @default.
• W1492292496 hasConcept C544956773 @default.
• W1492292496 hasConcept C57863236 @default.
• W1492292496 hasConcept C87359718 @default.
• W1492292496 hasConceptScore W1492292496C108225325 @default.
• W1492292496 hasConceptScore W1492292496C113196181 @default.
• W1492292496 hasConceptScore W1492292496C147789679 @default.
• W1492292496 hasConceptScore W1492292496C159985019 @default.
• W1492292496 hasConceptScore W1492292496C171250308 @default.
• W1492292496 hasConceptScore W1492292496C17525397 @default.
• W1492292496 hasConceptScore W1492292496C178790620 @default.
• W1492292496 hasConceptScore W1492292496C185592680 @default.
• W1492292496 hasConceptScore W1492292496C191897082 @default.
• W1492292496 hasConceptScore W1492292496C191952053 @default.
• W1492292496 hasConceptScore W1492292496C192562407 @default.
• W1492292496 hasConceptScore W1492292496C2777855556 @default.
• W1492292496 hasConceptScore W1492292496C2779227376 @default.
• W1492292496 hasConceptScore W1492292496C2779851234 @default.
• W1492292496 hasConceptScore W1492292496C2780565262 @default.
• W1492292496 hasConceptScore W1492292496C30066665 @default.
• W1492292496 hasConceptScore W1492292496C43617362 @default.
• W1492292496 hasConceptScore W1492292496C49040817 @default.
• W1492292496 hasConceptScore W1492292496C501308230 @default.
• W1492292496 hasConceptScore W1492292496C544956773 @default.
• W1492292496 hasConceptScore W1492292496C57863236 @default.
• W1492292496 hasConceptScore W1492292496C87359718 @default.
• W1492292496 hasIssue "14" @default.
• W1492292496 hasLocation W14922924961 @default.
• W1492292496 hasOpenAccess W1492292496 @default.
• W1492292496 hasPrimaryLocation W14922924961 @default.
• W1492292496 hasRelatedWork W1976261375 @default.
• W1492292496 hasRelatedWork W1978060492 @default.
• W1492292496 hasRelatedWork W1989564944 @default.
• W1492292496 hasRelatedWork W2048269824 @default.
• W1492292496 hasRelatedWork W2052759331 @default.
• W1492292496 hasRelatedWork W2065258228 @default.
• W1492292496 hasRelatedWork W2065669148 @default.
• W1492292496 hasRelatedWork W2088081281 @default.
• W1492292496 hasRelatedWork W2121493818 @default.
• W1492292496 hasRelatedWork W2275386326 @default.
• W1492292496 hasVolume "77" @default.
• W1492292496 isParatext "false" @default.
• W1492292496 isRetracted "false" @default.
• W1492292496 magId "1492292496" @default.

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