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- W1492396317 abstract "Micromachining conditions for silicon using a CW lasers and different gas ambients were reported. We report results of experimental investigation of the etch rate of silicon using a CW 532 nm laser in sulfur hexafluoride atmosphere, and three-dimensional temporal computer modeling of the process" @default.
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- W1492396317 date "2006-01-25" @default.
- W1492396317 modified "2023-09-25" @default.
- W1492396317 title "Laser micromachining of silicon in sulfur hexafluoride atmosphere: experiment and numerical simulation" @default.
- W1492396317 doi "https://doi.org/10.1109/cleoe.2005.1568441" @default.
- W1492396317 hasPublicationYear "2006" @default.
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