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- W1494002970 abstract "Chapter 17.2.5.4.2 Hot Filament CVD C. L Aardahl, C. L AardahlSearch for more papers by this authorJ. W. Rogers Jr., J. W. Rogers Jr.Search for more papers by this author C. L Aardahl, C. L AardahlSearch for more papers by this authorJ. W. Rogers Jr., J. W. Rogers Jr.Search for more papers by this author Book Editor(s):J. J. Zuckerman, J. J. ZuckermanSearch for more papers by this authorJim. D. Atwood, Jim. D. AtwoodSearch for more papers by this author First published: 01 January 1999 https://doi.org/10.1002/9780470145333.ch55Book Series:Inorganic Reactions and Methods AboutPDFPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShareShare a linkShare onFacebookTwitterLinked InRedditWechat No abstract is available for this article. Inorganic Reactions and Methods: Formation of Ceramics, Volume 18 RelatedInformation" @default.
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- W1494002970 title "Hot Filament CVD" @default.
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- W1494002970 doi "https://doi.org/10.1002/9780470145333.ch55" @default.
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