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- W14956348 abstract "An energy- and angle-refocusing time of flight instrument for Surface Analysis by Resonance Ionization of Sputtered Atoms (SARISA) has been tested by analysis of an Fe-implanted silicon sample (10/sup 11/ atoms/cm/sup 2/, 60 keV). Data obtained were: 5% collection efficiency and <2 ppB sensitivity (for S/N = 1, 1000 s experiment; effective repetition rate = 10 Hz, 0.9 monolayer total removed in an individual measurement). Ion pulse: 2 ..mu..A for 2 ..mu..s, area 0.05 mm/sup 2/ for RIS data, 2 x 2 mm/sup 2/ raster for depth profiling." @default.
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- W14956348 date "1986-01-01" @default.
- W14956348 modified "2023-09-27" @default.
- W14956348 title "Trace surface analysis via RIS/TOF mass spectrometry" @default.
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