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- W1495697730 abstract "Many environmental and health impacts from semi- conductor processing are tied to the design of the manufacturing equipment. Evaluating solutions to properly treat effluents from semiconductor tools has become an increasingly important part of supply chain management and equipment procurement deci- sions. Accordingly, understanding the environmental footprint associated with equipment sets is essential for both equipment manufacturers and semiconductor manufacturers seeking to improve their products’ environmental and financial perfor- mance. Equipment environmental performance must be evaluated within the context of the factory infrastructure and auxiliary equipment sets, with appropriate allocations of impacts from additional steps, both upstream and downstream of the wafer processing tools (chemical precursor delivery as well as byprod- ucts treatment). Several challenges to environmental assessments arise from the nature of semiconductor manufacturing itself, due to short process life cycles, complexity of processes, and the need to track diverse inter-related impacts. Environmental value systems analysis (EnV-S) is an analytical tool to evaluate the environmental performance of semiconductor processing. EnV-S develops environmental assessments through a “bottom-up” analysis approach, assembling equipment environmental models to describe a system. This paper presents the use of EnV-S as a tool to quantify the environmental impact of a product or process by creating an operational signature along multiple dimensions of cost and environmental and health factors. The use of EnV-S is illustrated through a case study comparing systems that abate emissions from dielectric chemical vapor deposition processes." @default.
- W1495697730 created "2016-06-24" @default.
- W1495697730 creator A5002687722 @default.
- W1495697730 creator A5010943910 @default.
- W1495697730 creator A5068716366 @default.
- W1495697730 date "2004-01-01" @default.
- W1495697730 modified "2023-09-28" @default.
- W1495697730 title "Quantifying the Environmental Footprint of Semiconductor Equipment Using the Environmental Value Systems Analysis (EnV-S)" @default.
- W1495697730 hasPublicationYear "2004" @default.
- W1495697730 type Work @default.
- W1495697730 sameAs 1495697730 @default.
- W1495697730 citedByCount "0" @default.
- W1495697730 crossrefType "journal-article" @default.
- W1495697730 hasAuthorship W1495697730A5002687722 @default.
- W1495697730 hasAuthorship W1495697730A5010943910 @default.
- W1495697730 hasAuthorship W1495697730A5068716366 @default.
- W1495697730 hasConcept C111919701 @default.
- W1495697730 hasConcept C112930515 @default.
- W1495697730 hasConcept C117671659 @default.
- W1495697730 hasConcept C119599485 @default.
- W1495697730 hasConcept C120823896 @default.
- W1495697730 hasConcept C127413603 @default.
- W1495697730 hasConcept C144133560 @default.
- W1495697730 hasConcept C151730666 @default.
- W1495697730 hasConcept C160671074 @default.
- W1495697730 hasConcept C164749845 @default.
- W1495697730 hasConcept C18903297 @default.
- W1495697730 hasConcept C191172861 @default.
- W1495697730 hasConcept C201995342 @default.
- W1495697730 hasConcept C21547014 @default.
- W1495697730 hasConcept C2524010 @default.
- W1495697730 hasConcept C2776207758 @default.
- W1495697730 hasConcept C2779343474 @default.
- W1495697730 hasConcept C33923547 @default.
- W1495697730 hasConcept C41008148 @default.
- W1495697730 hasConcept C66018809 @default.
- W1495697730 hasConcept C66204764 @default.
- W1495697730 hasConcept C76155785 @default.
- W1495697730 hasConcept C78175975 @default.
- W1495697730 hasConcept C83516724 @default.
- W1495697730 hasConcept C86803240 @default.
- W1495697730 hasConcept C90673727 @default.
- W1495697730 hasConcept C98045186 @default.
- W1495697730 hasConceptScore W1495697730C111919701 @default.
- W1495697730 hasConceptScore W1495697730C112930515 @default.
- W1495697730 hasConceptScore W1495697730C117671659 @default.
- W1495697730 hasConceptScore W1495697730C119599485 @default.
- W1495697730 hasConceptScore W1495697730C120823896 @default.
- W1495697730 hasConceptScore W1495697730C127413603 @default.
- W1495697730 hasConceptScore W1495697730C144133560 @default.
- W1495697730 hasConceptScore W1495697730C151730666 @default.
- W1495697730 hasConceptScore W1495697730C160671074 @default.
- W1495697730 hasConceptScore W1495697730C164749845 @default.
- W1495697730 hasConceptScore W1495697730C18903297 @default.
- W1495697730 hasConceptScore W1495697730C191172861 @default.
- W1495697730 hasConceptScore W1495697730C201995342 @default.
- W1495697730 hasConceptScore W1495697730C21547014 @default.
- W1495697730 hasConceptScore W1495697730C2524010 @default.
- W1495697730 hasConceptScore W1495697730C2776207758 @default.
- W1495697730 hasConceptScore W1495697730C2779343474 @default.
- W1495697730 hasConceptScore W1495697730C33923547 @default.
- W1495697730 hasConceptScore W1495697730C41008148 @default.
- W1495697730 hasConceptScore W1495697730C66018809 @default.
- W1495697730 hasConceptScore W1495697730C66204764 @default.
- W1495697730 hasConceptScore W1495697730C76155785 @default.
- W1495697730 hasConceptScore W1495697730C78175975 @default.
- W1495697730 hasConceptScore W1495697730C83516724 @default.
- W1495697730 hasConceptScore W1495697730C86803240 @default.
- W1495697730 hasConceptScore W1495697730C90673727 @default.
- W1495697730 hasConceptScore W1495697730C98045186 @default.
- W1495697730 hasLocation W14956977301 @default.
- W1495697730 hasOpenAccess W1495697730 @default.
- W1495697730 hasPrimaryLocation W14956977301 @default.
- W1495697730 hasRelatedWork W1571649628 @default.
- W1495697730 hasRelatedWork W1931141637 @default.
- W1495697730 hasRelatedWork W200077246 @default.
- W1495697730 hasRelatedWork W2002346632 @default.
- W1495697730 hasRelatedWork W2025027063 @default.
- W1495697730 hasRelatedWork W2056601650 @default.
- W1495697730 hasRelatedWork W2061857775 @default.
- W1495697730 hasRelatedWork W2062349952 @default.
- W1495697730 hasRelatedWork W2110102826 @default.
- W1495697730 hasRelatedWork W2114646721 @default.
- W1495697730 hasRelatedWork W2151793750 @default.
- W1495697730 hasRelatedWork W2162914109 @default.
- W1495697730 hasRelatedWork W2321584512 @default.
- W1495697730 hasRelatedWork W2322239299 @default.
- W1495697730 hasRelatedWork W2336827881 @default.
- W1495697730 hasRelatedWork W2341444736 @default.
- W1495697730 hasRelatedWork W2536670822 @default.
- W1495697730 hasRelatedWork W2999965614 @default.
- W1495697730 hasRelatedWork W49552973 @default.
- W1495697730 hasRelatedWork W2467754736 @default.
- W1495697730 isParatext "false" @default.
- W1495697730 isRetracted "false" @default.
- W1495697730 magId "1495697730" @default.
- W1495697730 workType "article" @default.