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- W1497449710 abstract "Abstract As the sophistication level of MEMS devices increased, the electromechanical systems on a chip started demanding equally sophisticated integrated on‐chip actuators. The first devices to include actuators were closed‐loop sensors to enhance the measurement accuracy. With time, complex mechanical systems on a chip were developed. Five basic control actuators were designed for MEMS devices: electrostatic, magnetic, piezoelectric, thermal, and optical. These are discussed." @default.
- W1497449710 created "2016-06-24" @default.
- W1497449710 creator A5034940571 @default.
- W1497449710 date "2005-02-24" @default.
- W1497449710 modified "2023-10-01" @default.
- W1497449710 title "Principles of <scp>MEMS</scp> Actuators" @default.
- W1497449710 cites W2097564843 @default.
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- W1497449710 doi "https://doi.org/10.1002/0471497398.mm482" @default.
- W1497449710 hasPublicationYear "2005" @default.
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