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• W1497452506 endingPage "90" @default.
• W1497452506 startingPage "84" @default.
• W1497452506 abstract "Rapid thermal oxidation (RTO) of the Ge-rich (x=0.7)Si1−xGex heterolayer is reported. In particular, the structural modifications of SiGe films during oxidation process and the dependence of the oxidation kinetics on Ge content, oxidation temperature, and oxide thickness have been studied. The segregation mechanism of Ge at the oxide∕SiGe interface is discussed. Interface properties of the RTO-grown oxides studied using high-frequency capacitance-voltage (C-V) characteristics of metal-oxide-semiconductor capacitors are also reported." @default.
• W1497452506 created "2016-06-24" @default.
• W1497452506 creator A5002567391 @default.
• W1497452506 creator A5005515797 @default.
• W1497452506 creator A5028634579 @default.
• W1497452506 creator A5036261096 @default.
• W1497452506 creator A5047167135 @default.
• W1497452506 creator A5055974130 @default.
• W1497452506 creator A5058651562 @default.
• W1497452506 creator A5066016881 @default.
• W1497452506 creator A5067239685 @default.
• W1497452506 creator A5072871749 @default.
• W1497452506 creator A5078135578 @default.
• W1497452506 creator A5080095202 @default.
• W1497452506 creator A5091533985 @default.
• W1497452506 date "2005-12-15" @default.
• W1497452506 modified "2023-10-18" @default.
• W1497452506 title "Rapid thermal oxidation of Ge-rich Si1−xGex heterolayers" @default.
• W1497452506 cites W1969950458 @default.
• W1497452506 cites W1970110544 @default.
• W1497452506 cites W1973694208 @default.
• W1497452506 cites W1976034846 @default.
• W1497452506 cites W1981248344 @default.
• W1497452506 cites W1995940513 @default.
• W1497452506 cites W2002250716 @default.
• W1497452506 cites W2002765787 @default.
• W1497452506 cites W2003537914 @default.
• W1497452506 cites W2006847410 @default.
• W1497452506 cites W2019853184 @default.
• W1497452506 cites W2021513918 @default.
• W1497452506 cites W2022760880 @default.
• W1497452506 cites W2029936679 @default.
• W1497452506 cites W2042759993 @default.
• W1497452506 cites W2043491555 @default.
• W1497452506 cites W2067859946 @default.
• W1497452506 cites W2075777869 @default.
• W1497452506 cites W2094306779 @default.
• W1497452506 cites W2094825113 @default.
• W1497452506 doi "https://doi.org/10.1116/1.2137329" @default.
• W1497452506 hasPublicationYear "2005" @default.
• W1497452506 type Work @default.
• W1497452506 sameAs 1497452506 @default.
• W1497452506 citedByCount "10" @default.
• W1497452506 countsByYear W14974525062012 @default.
• W1497452506 countsByYear W14974525062018 @default.
• W1497452506 countsByYear W14974525062021 @default.
• W1497452506 crossrefType "journal-article" @default.
• W1497452506 hasAuthorship W1497452506A5002567391 @default.
• W1497452506 hasAuthorship W1497452506A5005515797 @default.
• W1497452506 hasAuthorship W1497452506A5028634579 @default.
• W1497452506 hasAuthorship W1497452506A5036261096 @default.
• W1497452506 hasAuthorship W1497452506A5047167135 @default.
• W1497452506 hasAuthorship W1497452506A5055974130 @default.
• W1497452506 hasAuthorship W1497452506A5058651562 @default.
• W1497452506 hasAuthorship W1497452506A5066016881 @default.
• W1497452506 hasAuthorship W1497452506A5067239685 @default.
• W1497452506 hasAuthorship W1497452506A5072871749 @default.
• W1497452506 hasAuthorship W1497452506A5078135578 @default.
• W1497452506 hasAuthorship W1497452506A5080095202 @default.
• W1497452506 hasAuthorship W1497452506A5091533985 @default.
• W1497452506 hasConcept C119599485 @default.
• W1497452506 hasConcept C121332964 @default.
• W1497452506 hasConcept C127413603 @default.
• W1497452506 hasConcept C147789679 @default.
• W1497452506 hasConcept C148898269 @default.
• W1497452506 hasConcept C153294291 @default.
• W1497452506 hasConcept C165801399 @default.
• W1497452506 hasConcept C17525397 @default.
• W1497452506 hasConcept C185592680 @default.
• W1497452506 hasConcept C191897082 @default.
• W1497452506 hasConcept C192562407 @default.
• W1497452506 hasConcept C204530211 @default.
• W1497452506 hasConcept C2779281663 @default.
• W1497452506 hasConcept C2779851234 @default.
• W1497452506 hasConcept C2993759403 @default.
• W1497452506 hasConcept C30066665 @default.
• W1497452506 hasConcept C42360764 @default.
• W1497452506 hasConcept C49040817 @default.
• W1497452506 hasConcept C52192207 @default.
• W1497452506 hasConcept C544153396 @default.
• W1497452506 hasConcept C62520636 @default.
• W1497452506 hasConceptScore W1497452506C119599485 @default.
• W1497452506 hasConceptScore W1497452506C121332964 @default.
• W1497452506 hasConceptScore W1497452506C127413603 @default.
• W1497452506 hasConceptScore W1497452506C147789679 @default.
• W1497452506 hasConceptScore W1497452506C148898269 @default.
• W1497452506 hasConceptScore W1497452506C153294291 @default.
• W1497452506 hasConceptScore W1497452506C165801399 @default.
• W1497452506 hasConceptScore W1497452506C17525397 @default.
• W1497452506 hasConceptScore W1497452506C185592680 @default.
• W1497452506 hasConceptScore W1497452506C191897082 @default.
• W1497452506 hasConceptScore W1497452506C192562407 @default.
• W1497452506 hasConceptScore W1497452506C204530211 @default.
• W1497452506 hasConceptScore W1497452506C2779281663 @default.
• W1497452506 hasConceptScore W1497452506C2779851234 @default.
• W1497452506 hasConceptScore W1497452506C2993759403 @default.
• W1497452506 hasConceptScore W1497452506C30066665 @default.
• W1497452506 hasConceptScore W1497452506C42360764 @default.

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