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- W1498128212 abstract "Nikon's newly developed immersion scanner, NSR-S630D, provides exceptional performance in product overlay, CD uniformity, and productivity at 10 nm hp node and beyond. Generally, maintaining machine accuracy and productivity at a high level is difficult because they are in a trade-off relationship. The NSR-S630D is equipped with new features including an encoder servo-controlled reticle stage, reticle bending mechanism, optics with enhanced thermal aberration control, and thermally stable wafer stage. These features enable the NSR-S630D to deliver highest accuracy and productivity." @default.
- W1498128212 created "2016-06-24" @default.
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- W1498128212 date "2015-03-01" @default.
- W1498128212 modified "2023-09-23" @default.
- W1498128212 title "An immersion scanner enabling 10 nm half pitch production and high productivity" @default.
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- W1498128212 doi "https://doi.org/10.1109/cstic.2015.7153350" @default.
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