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- W1498133670 abstract "In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage." @default.
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- W1498133670 date "2003-06-25" @default.
- W1498133670 modified "2023-09-24" @default.
- W1498133670 title "Segmented deformable micro-mirror for free-space optical communication" @default.
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- W1498133670 doi "https://doi.org/10.1109/omems.2002.1031509" @default.
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