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- W1498358743 abstract "The first SiGe p-MOSFETs with triangular Ge profiles, fabricated in a Si CMOS-compatible LOCOS isolated process are reported. The feasibility of triangular profiles with peak Ge mole fractions as high as 50% is demonstrated for both CVD and MBE MOSFETs. The transconductance of 3 ?m devices with 0-40% Ge profiles is 34 mS/mm, 100% higher than that of the corresponding Si p-MOSFET fabricated on the same chip." @default.
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- W1498358743 date "1994-09-01" @default.
- W1498358743 modified "2023-10-16" @default.
- W1498358743 title "Si/SiGe Heterostructure p-MOSFET with Triangular Ge Channel Profiles" @default.
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