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- W1499042904 abstract "Processing techniques utilizing low temperature depositions and pulsed lasers allow the fabrication of polysilicon thin film transistors (TFT`s) on plastic substrates. By limiting the silicon, SiO2, and aluminum deposition temperatures to 100(degrees)C, and by using pulsed laser crystallization and doping of the silicon, we have demonstrated functioning polysilicon TFT`s fabricated on polyester substrates with channel mobilities of up to 7.5 cm2/V-sec and Ion/Ioff current ratios of up to 1x10(to the 6th power)." @default.
- W1499042904 created "2016-06-24" @default.
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- W1499042904 date "1997-08-06" @default.
- W1499042904 modified "2023-09-24" @default.
- W1499042904 title "Polysilicon TFT fabrication on plastic substrates" @default.
- W1499042904 hasPublicationYear "1997" @default.
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