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- W1499706903 abstract "This chapter contains sections titled: Introduction MEMS/Micromachined Passive Elements: Pros and Cons MEMS Inductors MEMS Capacitors Conclusions References" @default.
- W1499706903 created "2016-06-24" @default.
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- W1499706903 date "2002-10-25" @default.
- W1499706903 modified "2023-09-30" @default.
- W1499706903 title "MEMS Inductors and Capacitors" @default.
- W1499706903 doi "https://doi.org/10.1002/0470856602.ch4" @default.
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