Matches in SemOpenAlex for { <https://semopenalex.org/work/W1501117513> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1501117513 endingPage "471" @default.
- W1501117513 startingPage "468" @default.
- W1501117513 abstract "Despite its high chemical stability, sputtered stoichiometric TiN can still be oxidized at temperatures below 400 oC, whereas a non-stoichiometric TiN is known to oxidize even at room temperature. In this work, the oxidation behaviour of thin TiN layers, realized via atomic layer deposition (ALD), is investigated. Our experiments on thermal oxidation of ALD TiN revealed the existence of a linear and parabolic regime. The extracted activation energies for the parabolic regime resemble the values obtained earlier for sputtered TiN (i.e., 2.0 eV and 1.55 eV for dry and wet oxidation, respectively). Oxidation of ALD TiN layers in reactive plasma’s showed the existence of two regimes; the first regime is linear and independent of temperature while the second regime depends on the temperature." @default.
- W1501117513 created "2016-06-24" @default.
- W1501117513 creator A5008300217 @default.
- W1501117513 creator A5019224182 @default.
- W1501117513 creator A5070064397 @default.
- W1501117513 creator A5077317252 @default.
- W1501117513 creator A5086070703 @default.
- W1501117513 creator A5086761333 @default.
- W1501117513 date "2008-11-27" @default.
- W1501117513 modified "2023-09-26" @default.
- W1501117513 title "Thermal and plasma-enhanced oxidation of ALD TiN" @default.
- W1501117513 hasPublicationYear "2008" @default.
- W1501117513 type Work @default.
- W1501117513 sameAs 1501117513 @default.
- W1501117513 citedByCount "1" @default.
- W1501117513 crossrefType "journal-article" @default.
- W1501117513 hasAuthorship W1501117513A5008300217 @default.
- W1501117513 hasAuthorship W1501117513A5019224182 @default.
- W1501117513 hasAuthorship W1501117513A5070064397 @default.
- W1501117513 hasAuthorship W1501117513A5077317252 @default.
- W1501117513 hasAuthorship W1501117513A5086070703 @default.
- W1501117513 hasAuthorship W1501117513A5086761333 @default.
- W1501117513 hasConcept C113196181 @default.
- W1501117513 hasConcept C121332964 @default.
- W1501117513 hasConcept C144082473 @default.
- W1501117513 hasConcept C147789679 @default.
- W1501117513 hasConcept C151730666 @default.
- W1501117513 hasConcept C171250308 @default.
- W1501117513 hasConcept C178790620 @default.
- W1501117513 hasConcept C179104552 @default.
- W1501117513 hasConcept C185592680 @default.
- W1501117513 hasConcept C19067145 @default.
- W1501117513 hasConcept C191897082 @default.
- W1501117513 hasConcept C192562407 @default.
- W1501117513 hasConcept C2779227376 @default.
- W1501117513 hasConcept C2779281663 @default.
- W1501117513 hasConcept C2816523 @default.
- W1501117513 hasConcept C43617362 @default.
- W1501117513 hasConcept C525849907 @default.
- W1501117513 hasConcept C59061564 @default.
- W1501117513 hasConcept C62520636 @default.
- W1501117513 hasConcept C64297162 @default.
- W1501117513 hasConcept C69544855 @default.
- W1501117513 hasConcept C82706917 @default.
- W1501117513 hasConcept C86803240 @default.
- W1501117513 hasConceptScore W1501117513C113196181 @default.
- W1501117513 hasConceptScore W1501117513C121332964 @default.
- W1501117513 hasConceptScore W1501117513C144082473 @default.
- W1501117513 hasConceptScore W1501117513C147789679 @default.
- W1501117513 hasConceptScore W1501117513C151730666 @default.
- W1501117513 hasConceptScore W1501117513C171250308 @default.
- W1501117513 hasConceptScore W1501117513C178790620 @default.
- W1501117513 hasConceptScore W1501117513C179104552 @default.
- W1501117513 hasConceptScore W1501117513C185592680 @default.
- W1501117513 hasConceptScore W1501117513C19067145 @default.
- W1501117513 hasConceptScore W1501117513C191897082 @default.
- W1501117513 hasConceptScore W1501117513C192562407 @default.
- W1501117513 hasConceptScore W1501117513C2779227376 @default.
- W1501117513 hasConceptScore W1501117513C2779281663 @default.
- W1501117513 hasConceptScore W1501117513C2816523 @default.
- W1501117513 hasConceptScore W1501117513C43617362 @default.
- W1501117513 hasConceptScore W1501117513C525849907 @default.
- W1501117513 hasConceptScore W1501117513C59061564 @default.
- W1501117513 hasConceptScore W1501117513C62520636 @default.
- W1501117513 hasConceptScore W1501117513C64297162 @default.
- W1501117513 hasConceptScore W1501117513C69544855 @default.
- W1501117513 hasConceptScore W1501117513C82706917 @default.
- W1501117513 hasConceptScore W1501117513C86803240 @default.
- W1501117513 hasLocation W15011175131 @default.
- W1501117513 hasOpenAccess W1501117513 @default.
- W1501117513 hasPrimaryLocation W15011175131 @default.
- W1501117513 hasRelatedWork W1973142952 @default.
- W1501117513 hasRelatedWork W1982421558 @default.
- W1501117513 hasRelatedWork W1986092526 @default.
- W1501117513 hasRelatedWork W1995303766 @default.
- W1501117513 hasRelatedWork W2010200920 @default.
- W1501117513 hasRelatedWork W2020828497 @default.
- W1501117513 hasRelatedWork W2030262449 @default.
- W1501117513 hasRelatedWork W2039114512 @default.
- W1501117513 hasRelatedWork W2047638485 @default.
- W1501117513 hasRelatedWork W2053472242 @default.
- W1501117513 hasRelatedWork W2084114879 @default.
- W1501117513 hasRelatedWork W2091557513 @default.
- W1501117513 hasRelatedWork W2149362513 @default.
- W1501117513 hasRelatedWork W2161733522 @default.
- W1501117513 hasRelatedWork W2514188570 @default.
- W1501117513 hasRelatedWork W2554007170 @default.
- W1501117513 hasRelatedWork W2603127374 @default.
- W1501117513 hasRelatedWork W2790148436 @default.
- W1501117513 hasRelatedWork W3191553939 @default.
- W1501117513 hasRelatedWork W419615219 @default.
- W1501117513 isParatext "false" @default.
- W1501117513 isRetracted "false" @default.
- W1501117513 magId "1501117513" @default.
- W1501117513 workType "article" @default.