Matches in SemOpenAlex for { <https://semopenalex.org/work/W1501329307> ?p ?o ?g. }
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- W1501329307 endingPage "270" @default.
- W1501329307 startingPage "267" @default.
- W1501329307 abstract "This paper presents a method for Aluminum inclusion into silicon based on ion mixing. Argon ions are implanted through a Al layer deposited on a silicon substrate. Several experiments consisting in implantation + annealing have been carried out in order to obtain low doped and deep P-N juntions. Besides, since this process has to be optimized, a implantation simulator based on the MonteCarlo method have been developed and coupled with SUPREM-3 simulations for diffusion process study. Results show that it is possible to obtain deep junction with reduced thermal budjet. Doses over 3e15cm-2 can not be used since undesirable effects occur when annealing the impurities." @default.
- W1501329307 created "2016-06-24" @default.
- W1501329307 creator A5009741194 @default.
- W1501329307 creator A5029342519 @default.
- W1501329307 creator A5035526543 @default.
- W1501329307 creator A5046181640 @default.
- W1501329307 creator A5065043843 @default.
- W1501329307 creator A5077900564 @default.
- W1501329307 creator A5081760403 @default.
- W1501329307 date "1996-09-01" @default.
- W1501329307 modified "2023-10-17" @default.
- W1501329307 title "Simulation and Experimental Results of Al Doping by Ion Beam Mixing Technique for Deep Low Doped Junction Formation" @default.
- W1501329307 hasPublicationYear "1996" @default.
- W1501329307 type Work @default.
- W1501329307 sameAs 1501329307 @default.
- W1501329307 citedByCount "1" @default.
- W1501329307 crossrefType "proceedings-article" @default.
- W1501329307 hasAuthorship W1501329307A5009741194 @default.
- W1501329307 hasAuthorship W1501329307A5029342519 @default.
- W1501329307 hasAuthorship W1501329307A5035526543 @default.
- W1501329307 hasAuthorship W1501329307A5046181640 @default.
- W1501329307 hasAuthorship W1501329307A5065043843 @default.
- W1501329307 hasAuthorship W1501329307A5077900564 @default.
- W1501329307 hasAuthorship W1501329307A5081760403 @default.
- W1501329307 hasConcept C113196181 @default.
- W1501329307 hasConcept C121332964 @default.
- W1501329307 hasConcept C127413603 @default.
- W1501329307 hasConcept C145148216 @default.
- W1501329307 hasConcept C178790620 @default.
- W1501329307 hasConcept C184779094 @default.
- W1501329307 hasConcept C185592680 @default.
- W1501329307 hasConcept C191897082 @default.
- W1501329307 hasConcept C192562407 @default.
- W1501329307 hasConcept C24326235 @default.
- W1501329307 hasConcept C2777855556 @default.
- W1501329307 hasConcept C41823505 @default.
- W1501329307 hasConcept C43617362 @default.
- W1501329307 hasConcept C49040817 @default.
- W1501329307 hasConcept C50774322 @default.
- W1501329307 hasConcept C513153333 @default.
- W1501329307 hasConcept C544956773 @default.
- W1501329307 hasConcept C547737533 @default.
- W1501329307 hasConcept C57863236 @default.
- W1501329307 hasConcept C71987851 @default.
- W1501329307 hasConcept C79176676 @default.
- W1501329307 hasConcept C93106096 @default.
- W1501329307 hasConceptScore W1501329307C113196181 @default.
- W1501329307 hasConceptScore W1501329307C121332964 @default.
- W1501329307 hasConceptScore W1501329307C127413603 @default.
- W1501329307 hasConceptScore W1501329307C145148216 @default.
- W1501329307 hasConceptScore W1501329307C178790620 @default.
- W1501329307 hasConceptScore W1501329307C184779094 @default.
- W1501329307 hasConceptScore W1501329307C185592680 @default.
- W1501329307 hasConceptScore W1501329307C191897082 @default.
- W1501329307 hasConceptScore W1501329307C192562407 @default.
- W1501329307 hasConceptScore W1501329307C24326235 @default.
- W1501329307 hasConceptScore W1501329307C2777855556 @default.
- W1501329307 hasConceptScore W1501329307C41823505 @default.
- W1501329307 hasConceptScore W1501329307C43617362 @default.
- W1501329307 hasConceptScore W1501329307C49040817 @default.
- W1501329307 hasConceptScore W1501329307C50774322 @default.
- W1501329307 hasConceptScore W1501329307C513153333 @default.
- W1501329307 hasConceptScore W1501329307C544956773 @default.
- W1501329307 hasConceptScore W1501329307C547737533 @default.
- W1501329307 hasConceptScore W1501329307C57863236 @default.
- W1501329307 hasConceptScore W1501329307C71987851 @default.
- W1501329307 hasConceptScore W1501329307C79176676 @default.
- W1501329307 hasConceptScore W1501329307C93106096 @default.
- W1501329307 hasLocation W15013293071 @default.
- W1501329307 hasOpenAccess W1501329307 @default.
- W1501329307 hasPrimaryLocation W15013293071 @default.
- W1501329307 hasRelatedWork W1623611510 @default.
- W1501329307 hasRelatedWork W1649708914 @default.
- W1501329307 hasRelatedWork W1839265182 @default.
- W1501329307 hasRelatedWork W1993595097 @default.
- W1501329307 hasRelatedWork W2008751366 @default.
- W1501329307 hasRelatedWork W2012755167 @default.
- W1501329307 hasRelatedWork W2023616358 @default.
- W1501329307 hasRelatedWork W2037302421 @default.
- W1501329307 hasRelatedWork W2052511023 @default.
- W1501329307 hasRelatedWork W2058269927 @default.
- W1501329307 hasRelatedWork W2064012921 @default.
- W1501329307 hasRelatedWork W2085350970 @default.
- W1501329307 hasRelatedWork W2087749013 @default.
- W1501329307 hasRelatedWork W2109196983 @default.
- W1501329307 hasRelatedWork W2377183903 @default.
- W1501329307 hasRelatedWork W2602899372 @default.
- W1501329307 hasRelatedWork W2738302411 @default.
- W1501329307 hasRelatedWork W2770442259 @default.
- W1501329307 hasRelatedWork W205459254 @default.
- W1501329307 hasRelatedWork W2849745940 @default.
- W1501329307 isParatext "false" @default.
- W1501329307 isRetracted "false" @default.
- W1501329307 magId "1501329307" @default.
- W1501329307 workType "article" @default.