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- W1501804568 abstract "We report the fabrication of Ga1−xInxAsyP1−y/InP vertical-cavity surface-emitting lasers for long-wavelength operation and optical pumping. Bottom mirrors and active regions grown by metal-organic vapour-phase epitaxy showed high reflectivities and excellent wavelength tuning. Si/SiO2 top mirrors were deposited by electron beam evaporation and shaped by lift-off. Laser mesas with various diameters and aspects ratios up to 14 were etched by reactive ion etching and a methane-based plasma. Lasing operation was obtained for mesa diameters down to 5 μm. The average threshold power for the mesa of 5 μm diameter was 18 mW. Devices with diameters of 30 μm or more operated up to 70 °C." @default.
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- W1501804568 date "1994-12-01" @default.
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- W1501804568 title "Fabrication of 1.5 μm optically pumped vertical-cavity surface-emitting lasers" @default.
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- W1501804568 doi "https://doi.org/10.1016/0921-5107(94)90066-3" @default.
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