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- W1502272913 abstract "Electromigration-induced failure remains a critical concern for evolving Cu/low-k metallization technologies. Low elastic moduli, characteristic of low-k dielectrics, and decreasing liner/diffusion barrier thicknesses, with decreased elastic stiffness, lead to significant reliability degradation [1,2]. Thus, achieving future reliability requirements, as current densities increase and interconnect dimensions decrease, will become increasingly challenging. We have undertaken a comprehensive study involving both the experimental characterization of metallization materials and reliability testing of fully processed test structures, as well as simulation and analyses of mechanical responses and electromigrationinduced stress evolution." @default.
- W1502272913 created "2016-06-24" @default.
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- W1502272913 date "2007-01-01" @default.
- W1502272913 modified "2023-09-23" @default.
- W1502272913 title "Effects of mechanical properties on the reliability of Cu/low-k metallization systems" @default.
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- W1502272913 hasPublicationYear "2007" @default.
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