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- W1503668310 abstract "Arsenic out-diffusing from Cobalt Disilicide into underlying silicon displays an enhanced activation level of up to 80%, and an enhanced diffusivity of greater than one order of magnitude. Boron, in contrast, displays a diffusivity as small as 0.25 times that expected. These observations are consistent with a considerable Si-vacancy injection and Si-interstitial depletion caused by the silicide layer in the silicon substrate." @default.
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- W1503668310 date "1989-01-01" @default.
- W1503668310 modified "2023-09-25" @default.
- W1503668310 title "The Outdiffusion of Boron and Arsenic from Preformed Cobalt Disilicide Layers" @default.
- W1503668310 doi "https://doi.org/10.1007/978-3-642-52314-4_51" @default.
- W1503668310 hasPublicationYear "1989" @default.
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