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• W1503750564 abstract "A MEMS based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor (C), gold doped silicon temperature sensor (T), a multiple diaphragm piezoresistive pressure sensor (D). The sensor elements have further been packaged to protect them from harsh marine environment. This paper provides the design, fabrication and initial test results on a prototype CTD sensor" @default.
• W1503750564 created "2016-06-24" @default.
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• W1503750564 date "2006-07-10" @default.
• W1503750564 modified "2023-09-26" @default.
• W1503750564 title "MEMS based Conductivity-Temperature-Depth (CTD) Sensor for Harsh Oceanic Environment" @default.
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• W1503750564 doi "https://doi.org/10.1109/oceans.2005.1640015" @default.
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