Matches in SemOpenAlex for { <https://semopenalex.org/work/W1503967086> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W1503967086 abstract "Summary form only given. This paper investigates the operation and performance of the end feed, compact ECR plasma source and compares the operation with earlier side feed excited designs. The plasma source investigated in this paper consists of a microwave applicator, quartz discharge chamber, and ECR magnet array. The microwave applicator is a cylindrical stainless steel microwave cavity, of 9.8 cm inner diameter. The cavity is internally tuned, with two degrees of freedom, by the adjustment of: 1) a sliding short, and 2) either an adjustable end feed loop or an adjustable end feed probe. Output variables measured were: absorbed power vs. cavity tuning, spatial electric field patterns, and Langmuir probe measured electron density and temperate. Comparisons of these output variables are made between: 1) the probe coupled side-feed source, 2) the new loop coupled end-feed configuration, and 3) the new probe coupled end-feed configuration. An equivalent circuit representing the electromagnetic characteristics of this source is also derived." @default.
- W1503967086 created "2016-06-24" @default.
- W1503967086 creator A5045362221 @default.
- W1503967086 creator A5052240318 @default.
- W1503967086 date "2002-12-23" @default.
- W1503967086 modified "2023-09-25" @default.
- W1503967086 title "Evaluation of an end-feed, loop coupled, compact microwave plasma source" @default.
- W1503967086 cites W1989905991 @default.
- W1503967086 doi "https://doi.org/10.1109/plasma.1996.550930" @default.
- W1503967086 hasPublicationYear "2002" @default.
- W1503967086 type Work @default.
- W1503967086 sameAs 1503967086 @default.
- W1503967086 citedByCount "0" @default.
- W1503967086 crossrefType "proceedings-article" @default.
- W1503967086 hasAuthorship W1503967086A5045362221 @default.
- W1503967086 hasAuthorship W1503967086A5052240318 @default.
- W1503967086 hasConcept C119599485 @default.
- W1503967086 hasConcept C120665830 @default.
- W1503967086 hasConcept C121332964 @default.
- W1503967086 hasConcept C127413603 @default.
- W1503967086 hasConcept C16389437 @default.
- W1503967086 hasConcept C176118016 @default.
- W1503967086 hasConcept C184779094 @default.
- W1503967086 hasConcept C186397771 @default.
- W1503967086 hasConcept C188224857 @default.
- W1503967086 hasConcept C192562407 @default.
- W1503967086 hasConcept C43503373 @default.
- W1503967086 hasConcept C44838205 @default.
- W1503967086 hasConcept C49040817 @default.
- W1503967086 hasConcept C62520636 @default.
- W1503967086 hasConcept C82706917 @default.
- W1503967086 hasConceptScore W1503967086C119599485 @default.
- W1503967086 hasConceptScore W1503967086C120665830 @default.
- W1503967086 hasConceptScore W1503967086C121332964 @default.
- W1503967086 hasConceptScore W1503967086C127413603 @default.
- W1503967086 hasConceptScore W1503967086C16389437 @default.
- W1503967086 hasConceptScore W1503967086C176118016 @default.
- W1503967086 hasConceptScore W1503967086C184779094 @default.
- W1503967086 hasConceptScore W1503967086C186397771 @default.
- W1503967086 hasConceptScore W1503967086C188224857 @default.
- W1503967086 hasConceptScore W1503967086C192562407 @default.
- W1503967086 hasConceptScore W1503967086C43503373 @default.
- W1503967086 hasConceptScore W1503967086C44838205 @default.
- W1503967086 hasConceptScore W1503967086C49040817 @default.
- W1503967086 hasConceptScore W1503967086C62520636 @default.
- W1503967086 hasConceptScore W1503967086C82706917 @default.
- W1503967086 hasLocation W15039670861 @default.
- W1503967086 hasOpenAccess W1503967086 @default.
- W1503967086 hasPrimaryLocation W15039670861 @default.
- W1503967086 hasRelatedWork W1165192472 @default.
- W1503967086 hasRelatedWork W1851163690 @default.
- W1503967086 hasRelatedWork W1991492719 @default.
- W1503967086 hasRelatedWork W1995034089 @default.
- W1503967086 hasRelatedWork W2085506638 @default.
- W1503967086 hasRelatedWork W2206646976 @default.
- W1503967086 hasRelatedWork W203279622 @default.
- W1503967086 hasRelatedWork W2140230276 @default.
- W1503967086 hasRelatedWork W2606687950 @default.
- W1503967086 hasRelatedWork W2814879732 @default.
- W1503967086 hasRelatedWork W2819539333 @default.
- W1503967086 hasRelatedWork W2834920824 @default.
- W1503967086 hasRelatedWork W2875825941 @default.
- W1503967086 hasRelatedWork W2878033038 @default.
- W1503967086 hasRelatedWork W2932134981 @default.
- W1503967086 hasRelatedWork W2960629347 @default.
- W1503967086 hasRelatedWork W2962547907 @default.
- W1503967086 hasRelatedWork W3117051190 @default.
- W1503967086 hasRelatedWork W3140806231 @default.
- W1503967086 hasRelatedWork W3145929950 @default.
- W1503967086 isParatext "false" @default.
- W1503967086 isRetracted "false" @default.
- W1503967086 magId "1503967086" @default.
- W1503967086 workType "article" @default.