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• W1504116013 abstract "Laser grooving is used for the singulation of advanced CMOS wafers since it is believed that it exerts lower mechanical stress than traditional blade dicing. The very local heating of wafers, however, might result in high thermal stress around the heat affected zone. In this work we present a model to predict the temperature distribution, material removal, and the resulting stress, in a sandwiched structure of metals and dielectric materials that are commonly found in the back-end of line of semiconductor wafers. Simulation results on realistic three dimensional back-end structures reveal that the presence of metals clearly affects both the ablation depth, and the stress in the material. Experiments showed a similar observation for the ablation depth. The shape of the crater, however, was found to be more uniform than predicted by simulations, which is probably due to the redistribution of molten metal." @default.
• W1504116013 created "2016-06-24" @default.
• W1504116013 creator A5000432025 @default.
• W1504116013 creator A5036523036 @default.
• W1504116013 creator A5049781332 @default.
• W1504116013 creator A5081074933 @default.
• W1504116013 date "2015-04-01" @default.
• W1504116013 modified "2023-09-26" @default.
• W1504116013 title "Laser grooving of semiconductor wafers: Comparing a simplified numerical approach with experiments" @default.
• W1504116013 cites W194886315 @default.
• W1504116013 cites W1977848013 @default.
• W1504116013 cites W1982847328 @default.
• W1504116013 cites W1986262657 @default.
• W1504116013 cites W1996076449 @default.
• W1504116013 cites W1999421891 @default.
• W1504116013 cites W2022236314 @default.
• W1504116013 cites W2028793577 @default.
• W1504116013 cites W2030982198 @default.
• W1504116013 cites W2038009496 @default.
• W1504116013 cites W2053509447 @default.
• W1504116013 cites W2109008229 @default.
• W1504116013 cites W2130003462 @default.
• W1504116013 cites W2131159311 @default.
• W1504116013 cites W2145662385 @default.
• W1504116013 cites W2148115037 @default.
• W1504116013 cites W2149581483 @default.
• W1504116013 cites W637247117 @default.
• W1504116013 doi "https://doi.org/10.1109/eurosime.2015.7103120" @default.
• W1504116013 hasPublicationYear "2015" @default.
• W1504116013 type Work @default.
• W1504116013 sameAs 1504116013 @default.
• W1504116013 citedByCount "2" @default.
• W1504116013 countsByYear W15041160132015 @default.
• W1504116013 countsByYear W15041160132020 @default.
• W1504116013 crossrefType "proceedings-article" @default.
• W1504116013 hasAuthorship W1504116013A5000432025 @default.
• W1504116013 hasAuthorship W1504116013A5036523036 @default.
• W1504116013 hasAuthorship W1504116013A5049781332 @default.
• W1504116013 hasAuthorship W1504116013A5081074933 @default.
• W1504116013 hasConcept C108225325 @default.
• W1504116013 hasConcept C120665830 @default.
• W1504116013 hasConcept C121332964 @default.
• W1504116013 hasConcept C133386390 @default.
• W1504116013 hasConcept C138885662 @default.
• W1504116013 hasConcept C159985019 @default.
• W1504116013 hasConcept C160671074 @default.
• W1504116013 hasConcept C165013422 @default.
• W1504116013 hasConcept C17744445 @default.
• W1504116013 hasConcept C192562407 @default.
• W1504116013 hasConcept C199539241 @default.
• W1504116013 hasConcept C21036866 @default.
• W1504116013 hasConcept C2779188808 @default.
• W1504116013 hasConcept C41895202 @default.
• W1504116013 hasConcept C49040817 @default.
• W1504116013 hasConcept C520434653 @default.
• W1504116013 hasConcept C74080474 @default.
• W1504116013 hasConcept C94625758 @default.
• W1504116013 hasConceptScore W1504116013C108225325 @default.
• W1504116013 hasConceptScore W1504116013C120665830 @default.
• W1504116013 hasConceptScore W1504116013C121332964 @default.
• W1504116013 hasConceptScore W1504116013C133386390 @default.
• W1504116013 hasConceptScore W1504116013C138885662 @default.
• W1504116013 hasConceptScore W1504116013C159985019 @default.
• W1504116013 hasConceptScore W1504116013C160671074 @default.
• W1504116013 hasConceptScore W1504116013C165013422 @default.
• W1504116013 hasConceptScore W1504116013C17744445 @default.
• W1504116013 hasConceptScore W1504116013C192562407 @default.
• W1504116013 hasConceptScore W1504116013C199539241 @default.
• W1504116013 hasConceptScore W1504116013C21036866 @default.
• W1504116013 hasConceptScore W1504116013C2779188808 @default.
• W1504116013 hasConceptScore W1504116013C41895202 @default.
• W1504116013 hasConceptScore W1504116013C49040817 @default.
• W1504116013 hasConceptScore W1504116013C520434653 @default.
• W1504116013 hasConceptScore W1504116013C74080474 @default.
• W1504116013 hasConceptScore W1504116013C94625758 @default.
• W1504116013 hasLocation W15041160131 @default.
• W1504116013 hasOpenAccess W1504116013 @default.
• W1504116013 hasPrimaryLocation W15041160131 @default.
• W1504116013 hasRelatedWork W1486476336 @default.
• W1504116013 hasRelatedWork W1895475375 @default.
• W1504116013 hasRelatedWork W1984910987 @default.
• W1504116013 hasRelatedWork W1995164434 @default.
• W1504116013 hasRelatedWork W1997092505 @default.
• W1504116013 hasRelatedWork W1999006720 @default.
• W1504116013 hasRelatedWork W2069814018 @default.
• W1504116013 hasRelatedWork W2099639594 @default.
• W1504116013 hasRelatedWork W2116825446 @default.
• W1504116013 hasRelatedWork W2156072299 @default.
• W1504116013 hasRelatedWork W2156835052 @default.
• W1504116013 hasRelatedWork W2157252187 @default.
• W1504116013 hasRelatedWork W2171770060 @default.
• W1504116013 hasRelatedWork W2178961569 @default.
• W1504116013 hasRelatedWork W2246677657 @default.
• W1504116013 hasRelatedWork W2346572626 @default.
• W1504116013 hasRelatedWork W2947341016 @default.
• W1504116013 hasRelatedWork W2971033428 @default.
• W1504116013 hasRelatedWork W3088149012 @default.
• W1504116013 hasRelatedWork W73111488 @default.
• W1504116013 isParatext "false" @default.
• W1504116013 isRetracted "false" @default.

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