Matches in SemOpenAlex for { <https://semopenalex.org/work/W1505660009> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W1505660009 abstract "We have completed an experimental study to investigate the use of infrared emission spectroscopy (IRES) for the quantitative analysis of borophosphosilicate glass (BPSG) thin films on silicon monitor wafers. Experimental parameters investigated included temperatures within the range used in the microelectronics industry to produce these films; hence the potential for using the IRES technique for real-time monitoring of the film deposition process has been evaluated. The film properties that were investigated included boron content, phosphorus content, film thickness, and film temperature. The studies were conducted over two temperature ranges, 125 to 225 *C and 300 to 400 *C. The later temperature range includes realistic processing temperatures for the chemical vapor deposition (CVD) of the BPSG films. Partial least squares (PLS) multivariate calibration methods were applied to spectral and film property calibration data. The cross-validated standard errors of prediction (CVSEP) fi-om the PLS analysis of the IRES spectraof21 calibration samples each measured at 6 temperatures in the 300 to 400 C range were found to be 0.09 wt. `?40 for B, 0.08 wt. `%0 for P, 3.6 ~m for film thickness, and 1.9 *C for temperature. By lowering the spectral resolution fi-om 4 to 32 cm-l and decreasing the number ofmore » spectral scans fi-om 128 to 1, we were able to determine that all the film properties could be measured in less than one second to the precision required for the manufacture and quality control of integrated circuits. Thus, real-time in-situ monitoring of BPSG thin films formed by CVD deposition on Si monitor wafers is possible with the methods reported here.« less" @default.
- W1505660009 created "2016-06-24" @default.
- W1505660009 creator A5060392773 @default.
- W1505660009 creator A5077867819 @default.
- W1505660009 creator A5086727818 @default.
- W1505660009 creator A5088208630 @default.
- W1505660009 date "1998-10-14" @default.
- W1505660009 modified "2023-09-23" @default.
- W1505660009 title "Quantitative Determination of Dielectric Thin-Film Properties Using Infrared Emission Spectroscopy" @default.
- W1505660009 hasPublicationYear "1998" @default.
- W1505660009 type Work @default.
- W1505660009 sameAs 1505660009 @default.
- W1505660009 citedByCount "0" @default.
- W1505660009 crossrefType "journal-article" @default.
- W1505660009 hasAuthorship W1505660009A5060392773 @default.
- W1505660009 hasAuthorship W1505660009A5077867819 @default.
- W1505660009 hasAuthorship W1505660009A5086727818 @default.
- W1505660009 hasAuthorship W1505660009A5088208630 @default.
- W1505660009 hasBestOaLocation W15056600091 @default.
- W1505660009 hasConcept C105795698 @default.
- W1505660009 hasConcept C113196181 @default.
- W1505660009 hasConcept C120665830 @default.
- W1505660009 hasConcept C121332964 @default.
- W1505660009 hasConcept C153642686 @default.
- W1505660009 hasConcept C158355884 @default.
- W1505660009 hasConcept C160671074 @default.
- W1505660009 hasConcept C165838908 @default.
- W1505660009 hasConcept C171250308 @default.
- W1505660009 hasConcept C178790620 @default.
- W1505660009 hasConcept C185592680 @default.
- W1505660009 hasConcept C187937830 @default.
- W1505660009 hasConcept C19067145 @default.
- W1505660009 hasConcept C192562407 @default.
- W1505660009 hasConcept C32891209 @default.
- W1505660009 hasConcept C33923547 @default.
- W1505660009 hasConcept C43617362 @default.
- W1505660009 hasConcept C49040817 @default.
- W1505660009 hasConcept C57410435 @default.
- W1505660009 hasConcept C62520636 @default.
- W1505660009 hasConceptScore W1505660009C105795698 @default.
- W1505660009 hasConceptScore W1505660009C113196181 @default.
- W1505660009 hasConceptScore W1505660009C120665830 @default.
- W1505660009 hasConceptScore W1505660009C121332964 @default.
- W1505660009 hasConceptScore W1505660009C153642686 @default.
- W1505660009 hasConceptScore W1505660009C158355884 @default.
- W1505660009 hasConceptScore W1505660009C160671074 @default.
- W1505660009 hasConceptScore W1505660009C165838908 @default.
- W1505660009 hasConceptScore W1505660009C171250308 @default.
- W1505660009 hasConceptScore W1505660009C178790620 @default.
- W1505660009 hasConceptScore W1505660009C185592680 @default.
- W1505660009 hasConceptScore W1505660009C187937830 @default.
- W1505660009 hasConceptScore W1505660009C19067145 @default.
- W1505660009 hasConceptScore W1505660009C192562407 @default.
- W1505660009 hasConceptScore W1505660009C32891209 @default.
- W1505660009 hasConceptScore W1505660009C33923547 @default.
- W1505660009 hasConceptScore W1505660009C43617362 @default.
- W1505660009 hasConceptScore W1505660009C49040817 @default.
- W1505660009 hasConceptScore W1505660009C57410435 @default.
- W1505660009 hasConceptScore W1505660009C62520636 @default.
- W1505660009 hasLocation W15056600091 @default.
- W1505660009 hasLocation W15056600092 @default.
- W1505660009 hasOpenAccess W1505660009 @default.
- W1505660009 hasPrimaryLocation W15056600091 @default.
- W1505660009 hasRelatedWork W1232873407 @default.
- W1505660009 hasRelatedWork W1598927773 @default.
- W1505660009 hasRelatedWork W1906256250 @default.
- W1505660009 hasRelatedWork W1978603871 @default.
- W1505660009 hasRelatedWork W1987329616 @default.
- W1505660009 hasRelatedWork W2093920935 @default.
- W1505660009 hasRelatedWork W2167502249 @default.
- W1505660009 hasRelatedWork W2366744508 @default.
- W1505660009 hasRelatedWork W2390633623 @default.
- W1505660009 hasRelatedWork W840712420 @default.
- W1505660009 isParatext "false" @default.
- W1505660009 isRetracted "false" @default.
- W1505660009 magId "1505660009" @default.
- W1505660009 workType "article" @default.