Matches in SemOpenAlex for { <https://semopenalex.org/work/W1506296867> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1506296867 endingPage "429" @default.
- W1506296867 startingPage "426" @default.
- W1506296867 abstract "Silicon carbide (SiC) thin films were produced on Si(1 0 0) at low growth temperatures of 750–1000°C, using the molecular ion beam deposition (IBD) technique with a precursor of organosilicon ions. The ions extracted at 25 keV were mass selected, and decelerated to 100 eV. The precursor of methylsilicenium ions (SiCH3+), which has a Si–C bond in the molecular structure, was generated from dimethylsilane (SiH2(CH3)2). The energy distribution of SiCH3+ ions was measured by a PPM421 plasma process monitor. It was confirmed that the energy distributions were 100±1 eV. The chemical bondings and surface structures of SiC thin films were analyzed by Raman spectroscopy and reflection high-energy electron diffraction (RHEED). In the Raman spectrum, a peak at 796 cm−1 was assigned to transverse optic phonon scattering in 3C–SiC. As a result of the analysis of RHEED patterns, 3C–SiC(1 0 0) were formed on Si(1 0 0) substrates. Using the molecular IBD technique with the precursor of methylsilicenium ions, the formation of SiC thin films is available on Si(1 0 0) at low temperature (750°C)." @default.
- W1506296867 created "2016-06-24" @default.
- W1506296867 creator A5019159610 @default.
- W1506296867 creator A5019731128 @default.
- W1506296867 creator A5037328536 @default.
- W1506296867 creator A5078213650 @default.
- W1506296867 date "2001-11-01" @default.
- W1506296867 modified "2023-09-27" @default.
- W1506296867 title "Growth of 3C–SiC( 100 ) thin films on Si( 100 ) by the molecular ion beam deposition" @default.
- W1506296867 cites W1580863239 @default.
- W1506296867 cites W2001628194 @default.
- W1506296867 cites W2021897546 @default.
- W1506296867 cites W2043724416 @default.
- W1506296867 cites W2054103962 @default.
- W1506296867 cites W2067467858 @default.
- W1506296867 cites W2075634566 @default.
- W1506296867 cites W2082816250 @default.
- W1506296867 doi "https://doi.org/10.1016/s0039-6028(01)01249-3" @default.
- W1506296867 hasPublicationYear "2001" @default.
- W1506296867 type Work @default.
- W1506296867 sameAs 1506296867 @default.
- W1506296867 citedByCount "24" @default.
- W1506296867 countsByYear W15062968672015 @default.
- W1506296867 countsByYear W15062968672016 @default.
- W1506296867 countsByYear W15062968672018 @default.
- W1506296867 countsByYear W15062968672019 @default.
- W1506296867 countsByYear W15062968672020 @default.
- W1506296867 countsByYear W15062968672021 @default.
- W1506296867 countsByYear W15062968672022 @default.
- W1506296867 countsByYear W15062968672023 @default.
- W1506296867 crossrefType "journal-article" @default.
- W1506296867 hasAuthorship W1506296867A5019159610 @default.
- W1506296867 hasAuthorship W1506296867A5019731128 @default.
- W1506296867 hasAuthorship W1506296867A5037328536 @default.
- W1506296867 hasAuthorship W1506296867A5078213650 @default.
- W1506296867 hasConcept C113196181 @default.
- W1506296867 hasConcept C120665830 @default.
- W1506296867 hasConcept C121332964 @default.
- W1506296867 hasConcept C145148216 @default.
- W1506296867 hasConcept C171250308 @default.
- W1506296867 hasConcept C178790620 @default.
- W1506296867 hasConcept C185592680 @default.
- W1506296867 hasConcept C19067145 @default.
- W1506296867 hasConcept C192562407 @default.
- W1506296867 hasConcept C207114421 @default.
- W1506296867 hasConcept C40003534 @default.
- W1506296867 hasConcept C43617362 @default.
- W1506296867 hasConcept C49040817 @default.
- W1506296867 hasConcept C50774322 @default.
- W1506296867 hasConcept C544956773 @default.
- W1506296867 hasConcept C77557913 @default.
- W1506296867 hasConceptScore W1506296867C113196181 @default.
- W1506296867 hasConceptScore W1506296867C120665830 @default.
- W1506296867 hasConceptScore W1506296867C121332964 @default.
- W1506296867 hasConceptScore W1506296867C145148216 @default.
- W1506296867 hasConceptScore W1506296867C171250308 @default.
- W1506296867 hasConceptScore W1506296867C178790620 @default.
- W1506296867 hasConceptScore W1506296867C185592680 @default.
- W1506296867 hasConceptScore W1506296867C19067145 @default.
- W1506296867 hasConceptScore W1506296867C192562407 @default.
- W1506296867 hasConceptScore W1506296867C207114421 @default.
- W1506296867 hasConceptScore W1506296867C40003534 @default.
- W1506296867 hasConceptScore W1506296867C43617362 @default.
- W1506296867 hasConceptScore W1506296867C49040817 @default.
- W1506296867 hasConceptScore W1506296867C50774322 @default.
- W1506296867 hasConceptScore W1506296867C544956773 @default.
- W1506296867 hasConceptScore W1506296867C77557913 @default.
- W1506296867 hasIssue "1-3" @default.
- W1506296867 hasLocation W15062968671 @default.
- W1506296867 hasOpenAccess W1506296867 @default.
- W1506296867 hasPrimaryLocation W15062968671 @default.
- W1506296867 hasRelatedWork W1649695185 @default.
- W1506296867 hasRelatedWork W2033305108 @default.
- W1506296867 hasRelatedWork W2058924817 @default.
- W1506296867 hasRelatedWork W2082484564 @default.
- W1506296867 hasRelatedWork W2084616009 @default.
- W1506296867 hasRelatedWork W2120472060 @default.
- W1506296867 hasRelatedWork W2144393929 @default.
- W1506296867 hasRelatedWork W2322625572 @default.
- W1506296867 hasRelatedWork W2496014351 @default.
- W1506296867 hasRelatedWork W4206052067 @default.
- W1506296867 hasVolume "493" @default.
- W1506296867 isParatext "false" @default.
- W1506296867 isRetracted "false" @default.
- W1506296867 magId "1506296867" @default.
- W1506296867 workType "article" @default.