Matches in SemOpenAlex for { <https://semopenalex.org/work/W1508062362> ?p ?o ?g. }
- W1508062362 endingPage "06GC01" @default.
- W1508062362 startingPage "06GC01" @default.
- W1508062362 abstract "We have investigated high-temperature and rapid annealing of a silicon carbide (SiC) wafer by atmospheric pressure thermal plasma jet (TPJ) irradiation for impurity activation. To reduce the temperature gradient in the SiC wafer, a DC current preheating system and the lateral back-and-forth motion of the wafer were introduced. A maximum surface temperature of 1835 °C within 2.4 s without sample breakage was achieved, and aluminum (Al), phosphorus (P), and arsenic (As) activations in SiC were demonstrated. We have investigated precise control of heating rate (Rh) and cooling rate (Rc) during rapid annealing of P+-implanted 4H-SiC and its impact on impurity activation. No dependence of resistivity on Rh was observed, while increasing Rc significantly decreased resistivity. A minimum resistivity of 0.0025 Ωcm and a maximum carrier concentration of 2.9 × 1020 cm−3 were obtained at Rc = 568 °C/s." @default.
- W1508062362 created "2016-06-24" @default.
- W1508062362 creator A5013690051 @default.
- W1508062362 creator A5032530951 @default.
- W1508062362 creator A5049181536 @default.
- W1508062362 creator A5049874651 @default.
- W1508062362 creator A5083109680 @default.
- W1508062362 creator A5083329732 @default.
- W1508062362 date "2015-05-27" @default.
- W1508062362 modified "2023-09-23" @default.
- W1508062362 title "High-efficiency impurity activation by precise control of cooling rate during atmospheric pressure thermal plasma jet annealing of 4H-SiC wafer" @default.
- W1508062362 cites W1665389026 @default.
- W1508062362 cites W1969883319 @default.
- W1508062362 cites W1973059589 @default.
- W1508062362 cites W1973756015 @default.
- W1508062362 cites W1974972625 @default.
- W1508062362 cites W1984271179 @default.
- W1508062362 cites W1984668845 @default.
- W1508062362 cites W1985392902 @default.
- W1508062362 cites W1995092748 @default.
- W1508062362 cites W1996360298 @default.
- W1508062362 cites W1997133401 @default.
- W1508062362 cites W2001193128 @default.
- W1508062362 cites W2005079553 @default.
- W1508062362 cites W2014270093 @default.
- W1508062362 cites W2015095379 @default.
- W1508062362 cites W2031264725 @default.
- W1508062362 cites W2033090048 @default.
- W1508062362 cites W2043295354 @default.
- W1508062362 cites W2043310877 @default.
- W1508062362 cites W2050285455 @default.
- W1508062362 cites W2056258815 @default.
- W1508062362 cites W2057546128 @default.
- W1508062362 cites W2090836865 @default.
- W1508062362 cites W2090847607 @default.
- W1508062362 cites W2094246053 @default.
- W1508062362 cites W2105448556 @default.
- W1508062362 cites W2106145730 @default.
- W1508062362 cites W2121261508 @default.
- W1508062362 cites W2151892686 @default.
- W1508062362 cites W4234752924 @default.
- W1508062362 cites W4242848305 @default.
- W1508062362 doi "https://doi.org/10.7567/jjap.54.06gc01" @default.
- W1508062362 hasPublicationYear "2015" @default.
- W1508062362 type Work @default.
- W1508062362 sameAs 1508062362 @default.
- W1508062362 citedByCount "4" @default.
- W1508062362 countsByYear W15080623622016 @default.
- W1508062362 countsByYear W15080623622021 @default.
- W1508062362 countsByYear W15080623622022 @default.
- W1508062362 countsByYear W15080623622023 @default.
- W1508062362 crossrefType "journal-article" @default.
- W1508062362 hasAuthorship W1508062362A5013690051 @default.
- W1508062362 hasAuthorship W1508062362A5032530951 @default.
- W1508062362 hasAuthorship W1508062362A5049181536 @default.
- W1508062362 hasAuthorship W1508062362A5049874651 @default.
- W1508062362 hasAuthorship W1508062362A5083109680 @default.
- W1508062362 hasAuthorship W1508062362A5083329732 @default.
- W1508062362 hasConcept C107872376 @default.
- W1508062362 hasConcept C113196181 @default.
- W1508062362 hasConcept C119947313 @default.
- W1508062362 hasConcept C121332964 @default.
- W1508062362 hasConcept C153294291 @default.
- W1508062362 hasConcept C159985019 @default.
- W1508062362 hasConcept C160671074 @default.
- W1508062362 hasConcept C178790620 @default.
- W1508062362 hasConcept C185544564 @default.
- W1508062362 hasConcept C185592680 @default.
- W1508062362 hasConcept C192562407 @default.
- W1508062362 hasConcept C200239111 @default.
- W1508062362 hasConcept C204530211 @default.
- W1508062362 hasConcept C2777855556 @default.
- W1508062362 hasConcept C49040817 @default.
- W1508062362 hasConcept C57879066 @default.
- W1508062362 hasConcept C71987851 @default.
- W1508062362 hasConcept C82706917 @default.
- W1508062362 hasConcept C85344455 @default.
- W1508062362 hasConcept C97355855 @default.
- W1508062362 hasConceptScore W1508062362C107872376 @default.
- W1508062362 hasConceptScore W1508062362C113196181 @default.
- W1508062362 hasConceptScore W1508062362C119947313 @default.
- W1508062362 hasConceptScore W1508062362C121332964 @default.
- W1508062362 hasConceptScore W1508062362C153294291 @default.
- W1508062362 hasConceptScore W1508062362C159985019 @default.
- W1508062362 hasConceptScore W1508062362C160671074 @default.
- W1508062362 hasConceptScore W1508062362C178790620 @default.
- W1508062362 hasConceptScore W1508062362C185544564 @default.
- W1508062362 hasConceptScore W1508062362C185592680 @default.
- W1508062362 hasConceptScore W1508062362C192562407 @default.
- W1508062362 hasConceptScore W1508062362C200239111 @default.
- W1508062362 hasConceptScore W1508062362C204530211 @default.
- W1508062362 hasConceptScore W1508062362C2777855556 @default.
- W1508062362 hasConceptScore W1508062362C49040817 @default.
- W1508062362 hasConceptScore W1508062362C57879066 @default.
- W1508062362 hasConceptScore W1508062362C71987851 @default.
- W1508062362 hasConceptScore W1508062362C82706917 @default.
- W1508062362 hasConceptScore W1508062362C85344455 @default.
- W1508062362 hasConceptScore W1508062362C97355855 @default.