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• W1509452449 abstract "Publisher Summary This chapter describes the basic principles of ion implantation into semiconductors. The chapter concentrates on the theoretical developments for calculating the electronic stopping power for energetic ions in solids. More specifically, the electronic stopping power investigates the linear response dielectric theory and the local density approximation method. Empirical formulas for evaluating the stopping power of protons are exemplified. With the linear-response dielectric theory and the LDA method, has been investigated the electronic stopping power for energetic ions moving through solids. First, for the stopping power for protons we obtained a fitted expression dependent on eight parameters, which is based on the results of numerical integration. It has been shown that our theory agrees with some of the experimental data and with Ziegler's results. Second, the BK theoretical model has been used to determine the effective charges of heavy ions. Some analytical expressions of the effective charges are obtained in low and high-velocity cases, respectively. Finally, the chapter discusses the “Coulomb explosion” course and the “vicinage effect” when a diatomic molecular ion is moving through solids." @default.
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• W1509452449 date "1997-01-01" @default.
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• W1509452449 title "Chapter 2 Electronic Stopping Power for Energetic Ions in Solids" @default.
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• W1509452449 doi "https://doi.org/10.1016/s0080-8784(08)62674-5" @default.
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