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- W1509959719 startingPage "283" @default.
- W1509959719 abstract "During the machining of brittle materials, the brittle-ductile transition (B-D-T) is related to the machining conditions. In this paper, micro-cutting is carried out to investigate the effect of B-D-T on the surface integrity of silicon single crystals. Surface texture, residual stress and crystal properties of the machined surface are evaluated with a surface roughness tester, scanning electron microscopy, atomic force microscopy and micro-Raman spectroscope. Results are as follows : (1) For the ductile mode cutting surface, the surface roughness of 0.005 μm Ra, compressive residual stress of 23.0 MPa, surface topography and crystal properties are nearly the same as that of the polishing surface. (2) For the brittle mode cutting surface, the value of the surface roughness Ra is much larger than that of the polishing surface, as is the compressive residual stress at the value of 172.5 MPa. (3) The value of the critical material removal rate, ΔVc, for ductile mode cutting, as well as the critical depth of cut, becomes smaller with the increase of feedrate." @default.
- W1509959719 created "2016-06-24" @default.
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- W1509959719 date "1993-01-01" @default.
- W1509959719 modified "2023-10-14" @default.
- W1509959719 title "Study on the Diamond Cutting of Silicon Single Crystal. 1st Report. The Effect of Brittle-Ductile Transition on Surface Integrity." @default.
- W1509959719 cites W2072129332 @default.
- W1509959719 doi "https://doi.org/10.1299/kikaic.59.283" @default.
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