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• W1510260921 abstract "Detection and characterization of microstructures is important in many research fields such as metrology, biology, astronomy, atmospheric contamination, etc. These structures include micro/nano particles deposited on surfaces or embedded in different media and their presence is typical, for instance, as a defect in the semiconductor industry or on optical surfaces. They also contribute to SERS and may contribute to solar cell performance [Sonnichsen et al., 2005; Stuart et al., 2005; Lee et al., 2007]. The central problem related to the study of morphological properties of microstructures (size, shape, composition, density, volume, etc.) is often lumped into the category of “Particle Sizing” and has been a primary research topic [Pena et al., 1999; Moreno and Gonzalez, 2000; Stuart et al., 2005; Lee et al., 2007]. There are a great variety of techniques available for the study of microand nanostructures, including profilometry and microscopy of any type: optical, electron, atomic force microscopy (AFM), etc. Those based on the analysis of the scattered light have become widely recognized as a powerful tool for the inspection of optical and non-optical surfaces, components, and systems. Light-scattering methods are fast, flexible and robust. Even more important, they are generally less expensive and non-invasive; that is, they do not require altering or destroying the sample under study [Germer et al., 2005; Johnson et al., 2002; Mulholland et al., 2003]. In this chapter we will focus on contaminated surfaces composed of scattering objects on or above smooth, flat substrates. When a scattering system gets altered either by the presence of a defect or by any kind of irregularity on its surface, the scattering pattern changes in a way that depends on the shape, size and material of the defect. Here, the interest lies not only in the characterization of the defect (shape, size, composition, etc.), but also on the mere detection of its presence. We will show in detail how the analysis of the backscattering patterns produced by such systems can be used in their characterization. This may be useful in practical situations, like the fabrication of a chip in the semiconductor industry in the case of serial-made microstructures, the performance of solar cells, for detection and" @default.
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• W1510260921 date "2011-03-16" @default.
• W1510260921 modified "2023-09-24" @default.
• W1510260921 title "Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering" @default.
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• W1510260921 doi "https://doi.org/10.5772/14049" @default.
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