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- W1511170147 abstract "Device fabrication requirements for 65nm and 45nm technologies further increase the demands on medium current implanters for higher process quality as well as for increased productivity and flexibility. Application space continues to grow beyond the traditional Vt adjustment implants to include other well and halo implants, creating the need for a broader energy range. Pressure for reduced CoO drives the need for higher productivity and this, in turn, drives requirements for tuning time, wafer handling speeds, beam currents and reliability that are substantially more aggressive than for older generation tools. Additionally, dose control, angle control and defect control standards have become more stringent. We discuss these requirements in more detail and describe the improvements that have been made to Varian’s next generation medium current tool in order to meet them." @default.
- W1511170147 created "2016-06-24" @default.
- W1511170147 creator A5039822795 @default.
- W1511170147 date "2006-01-01" @default.
- W1511170147 modified "2023-10-16" @default.
- W1511170147 title "Next Generation Medium Current Product: VIISta 900XP" @default.
- W1511170147 cites W1644851989 @default.
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- W1511170147 doi "https://doi.org/10.1063/1.2401527" @default.
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