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- W1511296708 abstract "thin film sensing devices has been fabricated by thermal oxidation of stacked Pt-Sn thin film on the heater. The thickness of Sn thin film deposited by thermal evaporation was and the thickness of Pt deposited by D. C. sputtering on Sn thin film was range. The XRD analysis show that the thin films are formed by grains with a diameter of about randomly connected and the crystalline phase of the thin films are preferentally oriented in the (110) direction. thin film device (Pt thickness : ) to 6000 ppm CO shows the sensitivity of 80% and high selectivity to CO. And the operating temperature and the thermal oxidation temperature of thin film device with high sensitivity to CO were and , respectively." @default.
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- W1511296708 date "1992-01-01" @default.
- W1511296708 modified "2023-09-28" @default.
- W1511296708 title "CO Sensing Characteristics of $Pt-SnO_{2-x}$ Thin Film Devices Fabricated by Thermal Oxidation" @default.
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