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• W1513560648 abstract "This chapter contains sections titled: Introduction The LIGA Process for Mold Inserts Advanced Issues in LIGA Fabrication Conclusions Acknowledgment References" @default.
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• W1513560648 date "2005-06-27" @default.
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• W1513560648 title "Lithographic Fabrication of Mold Inserts" @default.
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• W1513560648 doi "https://doi.org/10.1002/9783527616725.ch8" @default.
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