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- W1513588951 abstract "A novel multilevel interconnection technology using anodic oxidation (MICTAO) has been proposed. This technology is applied to multiphase unidirectional transducers (UDTs) and to a novel configuration of single-phase UDTs. It is shown that multiphase UDTs can be easily fabricated using MICTAO. A high breakdown voltage between multilevel electrodes is obtained, i.e. 35 V for an Al/sub 2/O/sub 3/ dielectric layer of thickness 0.05 mu m. Experimental results show a minimum insertion loss of 2.0 dB at 260 MHz. >" @default.
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- W1513588951 date "2003-01-13" @default.
- W1513588951 modified "2023-09-26" @default.
- W1513588951 title "Surface acoustic wave unidirectional transducers using anodic oxidation technology and low loss filters" @default.
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- W1513588951 doi "https://doi.org/10.1109/ultsym.1989.66962" @default.
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