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- W1514110215 abstract "We have developed a fast and stable measuring system of lattice spacing with precision of 10−8 for a silicon crystal at the Photon Factory. Using a combination of this system with an autocollimator, we can not only measure d‐spacing, but also can determine lattice plane orientation with sub‐arcsec resolution in the same measurement process. We report a mapping measurement of a Boron‐doped CZ silicon wafer with 1mm2 spatial resolution." @default.
- W1514110215 created "2016-06-24" @default.
- W1514110215 creator A5022387395 @default.
- W1514110215 date "2004-01-01" @default.
- W1514110215 modified "2023-09-24" @default.
- W1514110215 title "A Novel High-Resolution Mapping Method of d-Spacing And Lattice Plane Orientation" @default.
- W1514110215 doi "https://doi.org/10.1063/1.1757992" @default.
- W1514110215 hasPublicationYear "2004" @default.
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