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• W1514432956 abstract "Abstract Theoretical relationships are derived for the mass and heat transfer coefficients applicable to horizontal reactors with tilted susceptor and non-rotating barrel and vertical reactors based on the boundary layer equations for momentum, heat, and mass transport. These relationships give the mass and heat transfer coefficients in terms of a group representing the effect of susceptor tilting. Schmidt and Prandtl numbers, and a modified Reynolds number including the effect of tilting. The results are given for two different cases: one in which the outer flow is free and the other in which the outer flow rate changes with the susceptor coordinate. The effects of buoyancy on concentration, thermal, and velocity boundary layer equations are discussed in the context of stable boundary layer. The results are applicable only to stable boundary layers." @default.
• W1514432956 created "2016-06-24" @default.
• W1514432956 creator A5022762808 @default.
• W1514432956 creator A5075477150 @default.
• W1514432956 date "1985-09-01" @default.
• W1514432956 modified "2023-09-27" @default.
• W1514432956 title "Design of epitaxial CVD reactors" @default.
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• W1514432956 doi "https://doi.org/10.1016/0022-0248(85)90219-2" @default.
• W1514432956 hasPublicationYear "1985" @default.
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