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- W1514646783 abstract "A semiconductor-based sensor array has been developed for highly toxic gas analysis in atmospheres with low oxygen contents and in the presence of humidity and corrosive gases. The device consists of 16 discrete sensing elements formed by tin oxide thin layers deposited by sputtering. The sensor array was exposed to a gas mixture formed by N/sub 2/, O/sub 2/, CO/sub 2/ H/sub 2/S, HF, HCI and water vapour with a constant flow rate of 500 ml/min. Once stabilized their electric resistance at different temperatures from 150-350/spl deg/C, the response to polluting gases coming from combustion processes (C/sub 6/H/sub 6/, SO/sub 2/, NO/sub x/) was studied." @default.
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- W1514646783 date "2005-08-25" @default.
- W1514646783 modified "2023-09-23" @default.
- W1514646783 title "Integrated Sensor Array For Gas Analysis In Combustion Atmospheres" @default.
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- W1514646783 doi "https://doi.org/10.1109/sensor.1995.717354" @default.
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