Matches in SemOpenAlex for { <https://semopenalex.org/work/W1514902848> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W1514902848 abstract "Silicon carbide (SiC) deposition for oxidation- and corrosion-resistant coatings typically uses methyltrichlorosilane (MTS) as a starting reactant. Little is known about the temperature and pressure dependence of the unimolecular decomposition of MTS. In this work, transition-state and unimolecular reaction theory are used to estimate the reaction rates for three MTS decomposition pathways: (1) MTS [yields] SiCl[sub 3] + CH[sub 3], (2) MTS [yields] CH[sub 2]SiCl[sub 3] + H, and (3) MTS [yields] C1[sub 2]Si=CH[sub 2] + HCl. The high-pressure rate constants for these reactions are in the ratio 0.865:0.118:0.017 at 1500 K (typical SiC deposition temperature), indicating that organosilicon compounds comprise approximately 14% of the products. The rate of Reaction (1), which is the dominant decomposition pathway, after correction to 1 atm pressure, is a factor of 4 lower than the only reported rate for MTS decomposition, indicating that additional experimental data are required to confidently assign the rate constant. The pressure dependence of Reaction (1) shows that reducing the pressure from 1 atm to 25 torr (currently under study for low-temperature SiC chemical vapor deposition) results in a ten-fold reduction in MTS decomposition rate." @default.
- W1514902848 created "2016-06-24" @default.
- W1514902848 creator A5018118602 @default.
- W1514902848 creator A5081159136 @default.
- W1514902848 creator A5043798610 @default.
- W1514902848 date "1993-02-01" @default.
- W1514902848 modified "2023-09-23" @default.
- W1514902848 title "Thermodynamics and kinetics of methyltrichlorosilane decomposition" @default.
- W1514902848 hasPublicationYear "1993" @default.
- W1514902848 type Work @default.
- W1514902848 sameAs 1514902848 @default.
- W1514902848 citedByCount "1" @default.
- W1514902848 crossrefType "journal-article" @default.
- W1514902848 hasAuthorship W1514902848A5018118602 @default.
- W1514902848 hasAuthorship W1514902848A5043798610 @default.
- W1514902848 hasAuthorship W1514902848A5081159136 @default.
- W1514902848 hasConcept C113196181 @default.
- W1514902848 hasConcept C121332964 @default.
- W1514902848 hasConcept C124681953 @default.
- W1514902848 hasConcept C147789679 @default.
- W1514902848 hasConcept C148898269 @default.
- W1514902848 hasConcept C178790620 @default.
- W1514902848 hasConcept C179104552 @default.
- W1514902848 hasConcept C185592680 @default.
- W1514902848 hasConcept C2778736354 @default.
- W1514902848 hasConcept C2780722187 @default.
- W1514902848 hasConcept C30646810 @default.
- W1514902848 hasConcept C36663273 @default.
- W1514902848 hasConcept C48333953 @default.
- W1514902848 hasConcept C57410435 @default.
- W1514902848 hasConcept C62520636 @default.
- W1514902848 hasConcept C93391505 @default.
- W1514902848 hasConcept C97355855 @default.
- W1514902848 hasConceptScore W1514902848C113196181 @default.
- W1514902848 hasConceptScore W1514902848C121332964 @default.
- W1514902848 hasConceptScore W1514902848C124681953 @default.
- W1514902848 hasConceptScore W1514902848C147789679 @default.
- W1514902848 hasConceptScore W1514902848C148898269 @default.
- W1514902848 hasConceptScore W1514902848C178790620 @default.
- W1514902848 hasConceptScore W1514902848C179104552 @default.
- W1514902848 hasConceptScore W1514902848C185592680 @default.
- W1514902848 hasConceptScore W1514902848C2778736354 @default.
- W1514902848 hasConceptScore W1514902848C2780722187 @default.
- W1514902848 hasConceptScore W1514902848C30646810 @default.
- W1514902848 hasConceptScore W1514902848C36663273 @default.
- W1514902848 hasConceptScore W1514902848C48333953 @default.
- W1514902848 hasConceptScore W1514902848C57410435 @default.
- W1514902848 hasConceptScore W1514902848C62520636 @default.
- W1514902848 hasConceptScore W1514902848C93391505 @default.
- W1514902848 hasConceptScore W1514902848C97355855 @default.
- W1514902848 hasLocation W15149028481 @default.
- W1514902848 hasOpenAccess W1514902848 @default.
- W1514902848 hasPrimaryLocation W15149028481 @default.
- W1514902848 hasRelatedWork W1501378433 @default.
- W1514902848 hasRelatedWork W1543140770 @default.
- W1514902848 hasRelatedWork W1566518949 @default.
- W1514902848 hasRelatedWork W1968806693 @default.
- W1514902848 hasRelatedWork W1980815788 @default.
- W1514902848 hasRelatedWork W2023064084 @default.
- W1514902848 hasRelatedWork W2024393291 @default.
- W1514902848 hasRelatedWork W2031480336 @default.
- W1514902848 hasRelatedWork W2045325712 @default.
- W1514902848 hasRelatedWork W206123747 @default.
- W1514902848 hasRelatedWork W2076869775 @default.
- W1514902848 hasRelatedWork W2078173099 @default.
- W1514902848 hasRelatedWork W2084048857 @default.
- W1514902848 hasRelatedWork W2084218844 @default.
- W1514902848 hasRelatedWork W2086273953 @default.
- W1514902848 hasRelatedWork W2140502135 @default.
- W1514902848 hasRelatedWork W2199262666 @default.
- W1514902848 hasRelatedWork W322257777 @default.
- W1514902848 hasRelatedWork W73359591 @default.
- W1514902848 hasRelatedWork W1672817368 @default.
- W1514902848 isParatext "false" @default.
- W1514902848 isRetracted "false" @default.
- W1514902848 magId "1514902848" @default.
- W1514902848 workType "article" @default.