FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1515047151> ?p ?o ?g. }

• W1515047151 endingPage "185" @default.
• W1515047151 startingPage "87" @default.
• W1515047151 abstract "Publisher Summary This chapter discusses the nanofabrication for electronics. Within the broad classification of nanotechnology one of the most important topics is nanoelectronics. It is primarily the relentless quest to reduce the size of integrated circuit elements that has been the driving force toward the development of nanotechnology. Nanotechnology in microelectronics describes the process of making minute artifacts in a material for electronic device applications and basic physics studies. It emphasizes the processes of pattern generation by which designed structures for devices are fabricated in a semiconductor substrate. Nanotechnology is particularly important because it enables device miniaturization, which not only results in dramatic reductions in the unit cost per function but also leads to improved performance. As device dimensions decrease, the intrinsic switching time decreases and there is a reduction in power consumption per device in the circuit, leading to more devices per chip and greater circuit functionality. Nanometer-scale fabrication with the potential for industrial applications was first demonstrated using electron-beam lithography (EBL) in the 1970s. Irradiation-sensitive film patterned by electrons, ions, or X-ray radiation, are generally used in plannar process. The purpose of resist exposure is to use the pattern in the resist as a mask for producing structures in the substrate material. After the exposure, the pattern generated in the resist has to be transferred to underlying materials to make functional devices. There are many high-resolution pattern transfer techniques and they can be either additive (liftoff and plating) or subtractive (dry etching or wet chemical etching). Structures less than 10 nm have been transferred to solid substrates, with both additive and subtractive methods." @default.
• W1515047151 created "2016-06-24" @default.
• W1515047151 creator A5007924251 @default.
• W1515047151 creator A5055958598 @default.
• W1515047151 date "1997-01-01" @default.
• W1515047151 modified "2023-09-27" @default.
• W1515047151 title "Nanofabrication for Electronics" @default.
• W1515047151 cites W1556278128 @default.
• W1515047151 cites W1965301697 @default.
• W1515047151 cites W1965473520 @default.
• W1515047151 cites W1965702561 @default.
• W1515047151 cites W1967769853 @default.
• W1515047151 cites W1970081470 @default.
• W1515047151 cites W1970223882 @default.
• W1515047151 cites W1970567033 @default.
• W1515047151 cites W1970588492 @default.
• W1515047151 cites W1971522545 @default.
• W1515047151 cites W1972062179 @default.
• W1515047151 cites W1972100825 @default.
• W1515047151 cites W1972219753 @default.
• W1515047151 cites W1972238877 @default.
• W1515047151 cites W1972680524 @default.
• W1515047151 cites W1974413455 @default.
• W1515047151 cites W1974843816 @default.
• W1515047151 cites W1975439088 @default.
• W1515047151 cites W1975440585 @default.
• W1515047151 cites W1975617774 @default.
• W1515047151 cites W1976900010 @default.
• W1515047151 cites W1977399155 @default.
• W1515047151 cites W1977444905 @default.
• W1515047151 cites W1978388835 @default.
• W1515047151 cites W1980685167 @default.
• W1515047151 cites W1981564862 @default.
• W1515047151 cites W1982607285 @default.
• W1515047151 cites W1983907975 @default.
• W1515047151 cites W1984567615 @default.
• W1515047151 cites W1984661386 @default.
• W1515047151 cites W1985079989 @default.
• W1515047151 cites W1985751970 @default.
• W1515047151 cites W1985765336 @default.
• W1515047151 cites W1986089126 @default.
• W1515047151 cites W1986342779 @default.
• W1515047151 cites W1986668683 @default.
• W1515047151 cites W1986880960 @default.
• W1515047151 cites W1987808507 @default.
• W1515047151 cites W1987881962 @default.
• W1515047151 cites W1989003107 @default.
• W1515047151 cites W1989322850 @default.
• W1515047151 cites W1989348968 @default.
• W1515047151 cites W1990353472 @default.
• W1515047151 cites W1990590124 @default.
• W1515047151 cites W1990614317 @default.
• W1515047151 cites W1990971622 @default.
• W1515047151 cites W1993562509 @default.
• W1515047151 cites W1994344136 @default.
• W1515047151 cites W1995128050 @default.
• W1515047151 cites W1995757088 @default.
• W1515047151 cites W1996816963 @default.
• W1515047151 cites W1996981522 @default.
• W1515047151 cites W1998068769 @default.
• W1515047151 cites W1998262849 @default.
• W1515047151 cites W1998323276 @default.
• W1515047151 cites W2000430851 @default.
• W1515047151 cites W2002186517 @default.
• W1515047151 cites W2002707215 @default.
• W1515047151 cites W2003435921 @default.
• W1515047151 cites W2003925743 @default.
• W1515047151 cites W2005204754 @default.
• W1515047151 cites W2005395289 @default.
• W1515047151 cites W2006791057 @default.
• W1515047151 cites W2007034405 @default.
• W1515047151 cites W2007263079 @default.
• W1515047151 cites W2008288924 @default.
• W1515047151 cites W2008606660 @default.
• W1515047151 cites W2008940261 @default.
• W1515047151 cites W2009129243 @default.
• W1515047151 cites W2009594670 @default.
• W1515047151 cites W2009890741 @default.
• W1515047151 cites W2010752560 @default.
• W1515047151 cites W2011600538 @default.
• W1515047151 cites W2012299578 @default.
• W1515047151 cites W2012392949 @default.
• W1515047151 cites W2012854644 @default.
• W1515047151 cites W2013204537 @default.
• W1515047151 cites W2013559926 @default.
• W1515047151 cites W2014871412 @default.
• W1515047151 cites W2017318305 @default.
• W1515047151 cites W2018548089 @default.
• W1515047151 cites W2021120900 @default.
• W1515047151 cites W2022064895 @default.
• W1515047151 cites W2023812151 @default.
• W1515047151 cites W2024838126 @default.
• W1515047151 cites W2024911740 @default.
• W1515047151 cites W2025095729 @default.
• W1515047151 cites W2026690824 @default.
• W1515047151 cites W2026924002 @default.
• W1515047151 cites W2027572134 @default.
• W1515047151 cites W2027789450 @default.

• next