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- W1515491355 abstract "The sputtering process is described in terms of its features: versatility, momentum transfer, configuration of target, precise controls and the relatively slow deposition rate. Sputtered films are evaluated in terms of adherence, coherence, and internal stresses. The strong adherence is attributed to the high kinetic energies of the sputtered material, sputter etched (cleaned) surface, and the submicroscopic particle size. An illustration is a sputtered solid film lubricant such as MoS2. Friction tests were conducted on a thin, 2000 A deg thick MoS2 film. These films are very dense and without observable pinholes, and the particle to particle cohesion is strong. Tolerances (film thickness) can be controlled to a millionth of a centimeter. Very adherent films of sputtered Teflon can be deposited in a single operation on any type of material (metal, glass, paper) and on any geometrical configuration with a dense adherent film." @default.
- W1515491355 created "2016-06-24" @default.
- W1515491355 creator A5077520889 @default.
- W1515491355 date "1972-05-01" @default.
- W1515491355 modified "2023-09-24" @default.
- W1515491355 title "Sputtering - A vacuum deposition method for coating material." @default.
- W1515491355 cites W2031498913 @default.
- W1515491355 hasPublicationYear "1972" @default.
- W1515491355 type Work @default.
- W1515491355 sameAs 1515491355 @default.
- W1515491355 citedByCount "2" @default.
- W1515491355 crossrefType "journal-article" @default.
- W1515491355 hasAuthorship W1515491355A5077520889 @default.
- W1515491355 hasConcept C111368507 @default.
- W1515491355 hasConcept C127313418 @default.
- W1515491355 hasConcept C151730666 @default.
- W1515491355 hasConcept C159985019 @default.
- W1515491355 hasConcept C171250308 @default.
- W1515491355 hasConcept C19067145 @default.
- W1515491355 hasConcept C191897082 @default.
- W1515491355 hasConcept C192562407 @default.
- W1515491355 hasConcept C22423302 @default.
- W1515491355 hasConcept C2778517922 @default.
- W1515491355 hasConcept C2780874159 @default.
- W1515491355 hasConcept C2781448156 @default.
- W1515491355 hasConcept C2816523 @default.
- W1515491355 hasConcept C61427134 @default.
- W1515491355 hasConcept C64297162 @default.
- W1515491355 hasConcept C86803240 @default.
- W1515491355 hasConceptScore W1515491355C111368507 @default.
- W1515491355 hasConceptScore W1515491355C127313418 @default.
- W1515491355 hasConceptScore W1515491355C151730666 @default.
- W1515491355 hasConceptScore W1515491355C159985019 @default.
- W1515491355 hasConceptScore W1515491355C171250308 @default.
- W1515491355 hasConceptScore W1515491355C19067145 @default.
- W1515491355 hasConceptScore W1515491355C191897082 @default.
- W1515491355 hasConceptScore W1515491355C192562407 @default.
- W1515491355 hasConceptScore W1515491355C22423302 @default.
- W1515491355 hasConceptScore W1515491355C2778517922 @default.
- W1515491355 hasConceptScore W1515491355C2780874159 @default.
- W1515491355 hasConceptScore W1515491355C2781448156 @default.
- W1515491355 hasConceptScore W1515491355C2816523 @default.
- W1515491355 hasConceptScore W1515491355C61427134 @default.
- W1515491355 hasConceptScore W1515491355C64297162 @default.
- W1515491355 hasConceptScore W1515491355C86803240 @default.
- W1515491355 hasLocation W15154913551 @default.
- W1515491355 hasOpenAccess W1515491355 @default.
- W1515491355 hasPrimaryLocation W15154913551 @default.
- W1515491355 hasRelatedWork W1605196457 @default.
- W1515491355 hasRelatedWork W1966000998 @default.
- W1515491355 hasRelatedWork W1987225402 @default.
- W1515491355 hasRelatedWork W2006449040 @default.
- W1515491355 hasRelatedWork W2008285441 @default.
- W1515491355 hasRelatedWork W2060704740 @default.
- W1515491355 hasRelatedWork W2062608894 @default.
- W1515491355 hasRelatedWork W2098097572 @default.
- W1515491355 hasRelatedWork W2133346564 @default.
- W1515491355 hasRelatedWork W2163072380 @default.
- W1515491355 hasRelatedWork W2241503355 @default.
- W1515491355 hasRelatedWork W2554722049 @default.
- W1515491355 hasRelatedWork W2562873586 @default.
- W1515491355 hasRelatedWork W2886311958 @default.
- W1515491355 hasRelatedWork W2984298466 @default.
- W1515491355 hasRelatedWork W3117707787 @default.
- W1515491355 hasRelatedWork W3204497105 @default.
- W1515491355 hasRelatedWork W3205804675 @default.
- W1515491355 hasRelatedWork W96101326 @default.
- W1515491355 hasRelatedWork W2826862122 @default.
- W1515491355 isParatext "false" @default.
- W1515491355 isRetracted "false" @default.
- W1515491355 magId "1515491355" @default.
- W1515491355 workType "article" @default.