Matches in SemOpenAlex for { <https://semopenalex.org/work/W1516098475> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W1516098475 endingPage "2897" @default.
- W1516098475 startingPage "2892" @default.
- W1516098475 abstract "Hard B-C-N mixed films were deposited by radio frequency (RF) sputtering using both hexagonal boron nitride (BN) and graphite (C) semicircular tareets. Vickers hardness, nano-indentation hardness and microwear resistance were evaluated. (1) The hardness of B-C-N mixed film is higher than that of C-N and B-N films. New hard B-C-N films were obtained under proper bias voltage and flow rate conditions. (2) Nano-indentation hardness showed similar results as Vickers hardness. Nano-indentation clarified the value on the hardness of the thin film, although Vickers hardness was influenced by the hardness of the substrate. (3)Microwear tests using an atomic force microscope demonstrated the excellent microwear resistance of B-C-N material element mixed film." @default.
- W1516098475 created "2016-06-24" @default.
- W1516098475 creator A5000001519 @default.
- W1516098475 creator A5017712601 @default.
- W1516098475 creator A5035614404 @default.
- W1516098475 date "1999-01-01" @default.
- W1516098475 modified "2023-09-27" @default.
- W1516098475 title "Deposition and Tribological Properties of Hard Boron, Carbon and Nitrogen, Mixed Films." @default.
- W1516098475 doi "https://doi.org/10.1299/kikaic.65.2892" @default.
- W1516098475 hasPublicationYear "1999" @default.
- W1516098475 type Work @default.
- W1516098475 sameAs 1516098475 @default.
- W1516098475 citedByCount "1" @default.
- W1516098475 crossrefType "journal-article" @default.
- W1516098475 hasAuthorship W1516098475A5000001519 @default.
- W1516098475 hasAuthorship W1516098475A5017712601 @default.
- W1516098475 hasAuthorship W1516098475A5035614404 @default.
- W1516098475 hasBestOaLocation W15160984751 @default.
- W1516098475 hasConcept C111368507 @default.
- W1516098475 hasConcept C127313418 @default.
- W1516098475 hasConcept C133392424 @default.
- W1516098475 hasConcept C159985019 @default.
- W1516098475 hasConcept C165720898 @default.
- W1516098475 hasConcept C167310744 @default.
- W1516098475 hasConcept C178790620 @default.
- W1516098475 hasConcept C185592680 @default.
- W1516098475 hasConcept C191897082 @default.
- W1516098475 hasConcept C192562407 @default.
- W1516098475 hasConcept C2777289219 @default.
- W1516098475 hasConcept C2779698641 @default.
- W1516098475 hasConcept C2780243435 @default.
- W1516098475 hasConcept C2780902562 @default.
- W1516098475 hasConcept C42698342 @default.
- W1516098475 hasConcept C49326732 @default.
- W1516098475 hasConcept C501308230 @default.
- W1516098475 hasConcept C87976508 @default.
- W1516098475 hasConceptScore W1516098475C111368507 @default.
- W1516098475 hasConceptScore W1516098475C127313418 @default.
- W1516098475 hasConceptScore W1516098475C133392424 @default.
- W1516098475 hasConceptScore W1516098475C159985019 @default.
- W1516098475 hasConceptScore W1516098475C165720898 @default.
- W1516098475 hasConceptScore W1516098475C167310744 @default.
- W1516098475 hasConceptScore W1516098475C178790620 @default.
- W1516098475 hasConceptScore W1516098475C185592680 @default.
- W1516098475 hasConceptScore W1516098475C191897082 @default.
- W1516098475 hasConceptScore W1516098475C192562407 @default.
- W1516098475 hasConceptScore W1516098475C2777289219 @default.
- W1516098475 hasConceptScore W1516098475C2779698641 @default.
- W1516098475 hasConceptScore W1516098475C2780243435 @default.
- W1516098475 hasConceptScore W1516098475C2780902562 @default.
- W1516098475 hasConceptScore W1516098475C42698342 @default.
- W1516098475 hasConceptScore W1516098475C49326732 @default.
- W1516098475 hasConceptScore W1516098475C501308230 @default.
- W1516098475 hasConceptScore W1516098475C87976508 @default.
- W1516098475 hasIssue "635" @default.
- W1516098475 hasLocation W15160984751 @default.
- W1516098475 hasOpenAccess W1516098475 @default.
- W1516098475 hasPrimaryLocation W15160984751 @default.
- W1516098475 hasRelatedWork W1516098475 @default.
- W1516098475 hasRelatedWork W1965360684 @default.
- W1516098475 hasRelatedWork W2032381420 @default.
- W1516098475 hasRelatedWork W2041700544 @default.
- W1516098475 hasRelatedWork W2168214999 @default.
- W1516098475 hasRelatedWork W2308795157 @default.
- W1516098475 hasRelatedWork W2567295000 @default.
- W1516098475 hasRelatedWork W2791308786 @default.
- W1516098475 hasRelatedWork W4285802919 @default.
- W1516098475 hasRelatedWork W4296066896 @default.
- W1516098475 hasVolume "65" @default.
- W1516098475 isParatext "false" @default.
- W1516098475 isRetracted "false" @default.
- W1516098475 magId "1516098475" @default.
- W1516098475 workType "article" @default.