Matches in SemOpenAlex for { <https://semopenalex.org/work/W1516906035> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W1516906035 abstract "Constant demand for mobility, interconnectivity and bandwidth is causing rapid expansion of the telecommunication infrastructure across the world. World-wide installation of optical fibre-based telecommunication systems has given rise to a promising optically-related sub segment of MEMS technology called micro-opto-electro-mechanical systems (MOEMS), commonly known as optical MEMS. MEMS telecommunications applications can be roughly divided into two key classes: optoelectronic packaging and functional optical devices. When functional optical devices are in question, optical MEMS devices that integrate optical, mechanical, and electrical components on a single wafer are allowing the implementation of various key optical-network elements in a compact, low-cost form. They usually involve small moving optical parts in order to obtain more advanced functionality. In optoelectronic packaging, MEMS are providing low-cost accurate optical alignment. At the moment, fabri‐ cation of complex optical MEMS devices and micro-electro-mechanical alignment devices is based on micromachining techniques combined with IC-based processing methods. Such manufacturing techniques have enabled low cost, mass production of optical MEMS compo‐ nents and devices. However, successful commercialization of optical MEMS technology that is being driven by the progress in optical communications strongly depends on device reliability. Optical MEMS device reliability is significantly more complex than silicon IC reliability, partly because optical MEMS failures can be either electrical or mechanical, and partly because there is a vast diversity of device designs, materials and functions. It is of the greatest importance that design and realization of optical MEMS device must include all levels of reliability issues from the onset of the project. For that reason, this chapter focuses on the identification and understanding of main mechanisms that cause failure of optical MEMS devices that are being used in telecommunications. First, the commonly used MEMS process‐" @default.
- W1516906035 created "2016-06-24" @default.
- W1516906035 creator A5018871188 @default.
- W1516906035 creator A5058804347 @default.
- W1516906035 date "2013-05-29" @default.
- W1516906035 modified "2023-09-27" @default.
- W1516906035 title "Optical MEMS for Telecommunications: Some Reliability Issues" @default.
- W1516906035 cites W1497924444 @default.
- W1516906035 cites W1975507449 @default.
- W1516906035 cites W2016189502 @default.
- W1516906035 cites W2016352472 @default.
- W1516906035 cites W2026339329 @default.
- W1516906035 cites W2026341891 @default.
- W1516906035 cites W2061495695 @default.
- W1516906035 cites W2062778012 @default.
- W1516906035 cites W2089755139 @default.
- W1516906035 cites W2126326964 @default.
- W1516906035 cites W2127738377 @default.
- W1516906035 cites W2130113088 @default.
- W1516906035 cites W2135307366 @default.
- W1516906035 cites W2136305965 @default.
- W1516906035 cites W2163227398 @default.
- W1516906035 cites W2164499381 @default.
- W1516906035 cites W2293648541 @default.
- W1516906035 cites W2532098613 @default.
- W1516906035 cites W2799259845 @default.
- W1516906035 cites W339892049 @default.
- W1516906035 cites W2338078816 @default.
- W1516906035 doi "https://doi.org/10.5772/55128" @default.
- W1516906035 hasPublicationYear "2013" @default.
- W1516906035 type Work @default.
- W1516906035 sameAs 1516906035 @default.
- W1516906035 citedByCount "3" @default.
- W1516906035 countsByYear W15169060352015 @default.
- W1516906035 countsByYear W15169060352017 @default.
- W1516906035 countsByYear W15169060352022 @default.
- W1516906035 crossrefType "book-chapter" @default.
- W1516906035 hasAuthorship W1516906035A5018871188 @default.
- W1516906035 hasAuthorship W1516906035A5058804347 @default.
- W1516906035 hasBestOaLocation W15169060351 @default.
- W1516906035 hasConcept C121332964 @default.
- W1516906035 hasConcept C127413603 @default.
- W1516906035 hasConcept C163258240 @default.
- W1516906035 hasConcept C192562407 @default.
- W1516906035 hasConcept C200601418 @default.
- W1516906035 hasConcept C37977207 @default.
- W1516906035 hasConcept C41008148 @default.
- W1516906035 hasConcept C43214815 @default.
- W1516906035 hasConcept C49040817 @default.
- W1516906035 hasConcept C62520636 @default.
- W1516906035 hasConcept C76155785 @default.
- W1516906035 hasConceptScore W1516906035C121332964 @default.
- W1516906035 hasConceptScore W1516906035C127413603 @default.
- W1516906035 hasConceptScore W1516906035C163258240 @default.
- W1516906035 hasConceptScore W1516906035C192562407 @default.
- W1516906035 hasConceptScore W1516906035C200601418 @default.
- W1516906035 hasConceptScore W1516906035C37977207 @default.
- W1516906035 hasConceptScore W1516906035C41008148 @default.
- W1516906035 hasConceptScore W1516906035C43214815 @default.
- W1516906035 hasConceptScore W1516906035C49040817 @default.
- W1516906035 hasConceptScore W1516906035C62520636 @default.
- W1516906035 hasConceptScore W1516906035C76155785 @default.
- W1516906035 hasLocation W15169060351 @default.
- W1516906035 hasLocation W15169060352 @default.
- W1516906035 hasOpenAccess W1516906035 @default.
- W1516906035 hasPrimaryLocation W15169060351 @default.
- W1516906035 hasRelatedWork W2033512842 @default.
- W1516906035 hasRelatedWork W2054543321 @default.
- W1516906035 hasRelatedWork W2065405606 @default.
- W1516906035 hasRelatedWork W2091943280 @default.
- W1516906035 hasRelatedWork W2355682521 @default.
- W1516906035 hasRelatedWork W2361928877 @default.
- W1516906035 hasRelatedWork W2374901194 @default.
- W1516906035 hasRelatedWork W2764722704 @default.
- W1516906035 hasRelatedWork W2899084033 @default.
- W1516906035 hasRelatedWork W4294000444 @default.
- W1516906035 isParatext "false" @default.
- W1516906035 isRetracted "false" @default.
- W1516906035 magId "1516906035" @default.
- W1516906035 workType "book-chapter" @default.