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• W1517387530 endingPage "29" @default.
• W1517387530 startingPage "24" @default.
• W1517387530 abstract "Surface morphologies and fundamental characteristics of molybdenum nitride films deposited by reactive dc magnetron sputtering were studied for application to Cu diffusion barrier. A phase transformation from Mo to γ-Mo₂N was observed at the N₂ gas flow ratios (N₂/(Ar+N₂)) equal to and larger than 0.2, whereas a second phase transformation to γ-MoN phase at 0.5 N₂ flow ratio. With the variation of the N₂ ratio the surface morphologies of the films were generally smooth except the cases of 0.2 and 0.3 N₂ gas ratios, where build-up of film stresses occurred. γ-Mo₂N film was found to crystallize at the deposition temperature of 400℃. The surfaces of γ-Mo₂N films deposited up to 400℃ were smooth, but the film deposited at 500℃ had very rough surface morphology. It seems that this was due to the building-up of thermal stresses at the high deposition temperature, which might lead to hillock formation." @default.
• W1517387530 created "2016-06-24" @default.
• W1517387530 creator A5041595810 @default.
• W1517387530 creator A5057698534 @default.
• W1517387530 creator A5091660120 @default.
• W1517387530 date "1997-06-01" @default.
• W1517387530 modified "2023-09-28" @default.
• W1517387530 title "Diffusion barrier characteristics of molybdenum nitride films for ultra - large - scale - integrated Cu metallization (I) ; Surface morphologies and characteristics of sputtered molybdenum nitride films" @default.
• W1517387530 cites W1598426896 @default.
• W1517387530 hasPublicationYear "1997" @default.
• W1517387530 type Work @default.
• W1517387530 sameAs 1517387530 @default.
• W1517387530 citedByCount "0" @default.
• W1517387530 crossrefType "journal-article" @default.
• W1517387530 hasAuthorship W1517387530A5041595810 @default.
• W1517387530 hasAuthorship W1517387530A5057698534 @default.
• W1517387530 hasAuthorship W1517387530A5091660120 @default.
• W1517387530 hasConcept C113196181 @default.
• W1517387530 hasConcept C121332964 @default.
• W1517387530 hasConcept C123408415 @default.
• W1517387530 hasConcept C127413603 @default.
• W1517387530 hasConcept C147789679 @default.
• W1517387530 hasConcept C150394285 @default.
• W1517387530 hasConcept C151730666 @default.
• W1517387530 hasConcept C15696416 @default.
• W1517387530 hasConcept C159985019 @default.
• W1517387530 hasConcept C171250308 @default.
• W1517387530 hasConcept C178790620 @default.
• W1517387530 hasConcept C185592680 @default.
• W1517387530 hasConcept C19067145 @default.
• W1517387530 hasConcept C191897082 @default.
• W1517387530 hasConcept C192562407 @default.
• W1517387530 hasConcept C194760766 @default.
• W1517387530 hasConcept C22423302 @default.
• W1517387530 hasConcept C2778836790 @default.
• W1517387530 hasConcept C2779227376 @default.
• W1517387530 hasConcept C2816523 @default.
• W1517387530 hasConcept C42360764 @default.
• W1517387530 hasConcept C43617362 @default.
• W1517387530 hasConcept C44280652 @default.
• W1517387530 hasConcept C499950583 @default.
• W1517387530 hasConcept C54355233 @default.
• W1517387530 hasConcept C549387045 @default.
• W1517387530 hasConcept C61427134 @default.
• W1517387530 hasConcept C6322943 @default.
• W1517387530 hasConcept C64297162 @default.
• W1517387530 hasConcept C69357855 @default.
• W1517387530 hasConcept C86803240 @default.
• W1517387530 hasConcept C97355855 @default.
• W1517387530 hasConceptScore W1517387530C113196181 @default.
• W1517387530 hasConceptScore W1517387530C121332964 @default.
• W1517387530 hasConceptScore W1517387530C123408415 @default.
• W1517387530 hasConceptScore W1517387530C127413603 @default.
• W1517387530 hasConceptScore W1517387530C147789679 @default.
• W1517387530 hasConceptScore W1517387530C150394285 @default.
• W1517387530 hasConceptScore W1517387530C151730666 @default.
• W1517387530 hasConceptScore W1517387530C15696416 @default.
• W1517387530 hasConceptScore W1517387530C159985019 @default.
• W1517387530 hasConceptScore W1517387530C171250308 @default.
• W1517387530 hasConceptScore W1517387530C178790620 @default.
• W1517387530 hasConceptScore W1517387530C185592680 @default.
• W1517387530 hasConceptScore W1517387530C19067145 @default.
• W1517387530 hasConceptScore W1517387530C191897082 @default.
• W1517387530 hasConceptScore W1517387530C192562407 @default.
• W1517387530 hasConceptScore W1517387530C194760766 @default.
• W1517387530 hasConceptScore W1517387530C22423302 @default.
• W1517387530 hasConceptScore W1517387530C2778836790 @default.
• W1517387530 hasConceptScore W1517387530C2779227376 @default.
• W1517387530 hasConceptScore W1517387530C2816523 @default.
• W1517387530 hasConceptScore W1517387530C42360764 @default.
• W1517387530 hasConceptScore W1517387530C43617362 @default.
• W1517387530 hasConceptScore W1517387530C44280652 @default.
• W1517387530 hasConceptScore W1517387530C499950583 @default.
• W1517387530 hasConceptScore W1517387530C54355233 @default.
• W1517387530 hasConceptScore W1517387530C549387045 @default.
• W1517387530 hasConceptScore W1517387530C61427134 @default.
• W1517387530 hasConceptScore W1517387530C6322943 @default.
• W1517387530 hasConceptScore W1517387530C64297162 @default.
• W1517387530 hasConceptScore W1517387530C69357855 @default.
• W1517387530 hasConceptScore W1517387530C86803240 @default.
• W1517387530 hasConceptScore W1517387530C97355855 @default.
• W1517387530 hasIssue "1" @default.
• W1517387530 hasLocation W15173875301 @default.
• W1517387530 hasOpenAccess W1517387530 @default.
• W1517387530 hasPrimaryLocation W15173875301 @default.
• W1517387530 hasRelatedWork W1579900461 @default.
• W1517387530 hasRelatedWork W1964053553 @default.
• W1517387530 hasRelatedWork W1992530620 @default.
• W1517387530 hasRelatedWork W1995639752 @default.
• W1517387530 hasRelatedWork W2028551613 @default.
• W1517387530 hasRelatedWork W2032632507 @default.
• W1517387530 hasRelatedWork W2040311896 @default.
• W1517387530 hasRelatedWork W2048892250 @default.
• W1517387530 hasRelatedWork W2054295299 @default.
• W1517387530 hasRelatedWork W2082172880 @default.
• W1517387530 hasRelatedWork W2086346691 @default.
• W1517387530 hasRelatedWork W2121260404 @default.
• W1517387530 hasRelatedWork W2147910039 @default.

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